7/25/2011	8:35:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:35:03 AM	Recipe started at 8:35 AM
7/25/2011	8:35:03 AM	Helium valve closed
7/25/2011	8:35:03 AM	H2 valve closed
7/25/2011	8:35:03 AM	BCl3 valve closed
7/25/2011	8:35:03 AM	PH3 valve closed
7/25/2011	8:35:03 AM	SiCl4 pre valve closed
7/25/2011	8:35:03 AM	SiCl4 post valve closed
7/25/2011	8:35:03 AM	Main Vac valve closed
7/25/2011	8:35:03 AM	Bypass valve closed
7/25/2011	8:35:03 AM	Bubbler valve closed
7/25/2011	8:35:03 AM	Helium MFC set to  0.000000
7/25/2011	8:35:03 AM	H2 MFC set to  0.000000
7/25/2011	8:35:03 AM	BCl3 MFC set to  0.000000
7/25/2011	8:35:03 AM	PHl3 MFC set to  0.000000
7/25/2011	8:35:03 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:35:03 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:35:03 AM	Tube furnace set to 0
7/25/2011	8:35:06 AM	H2 valve closed
7/25/2011	8:35:06 AM	BCl3 valve closed
7/25/2011	8:35:06 AM	PH3 valve closed
7/25/2011	8:35:06 AM	SiCl4 pre valve closed
7/25/2011	8:35:06 AM	SiCl4 post valve closed
7/25/2011	8:35:06 AM	Main Vac valve closed
7/25/2011	8:35:06 AM	Bypass valve closed
7/25/2011	8:35:06 AM	Bubbler valve closed
7/25/2011	8:35:06 AM	Helium valve opened
7/25/2011	8:35:06 AM	Helium MFC set to  500.000000
7/25/2011	8:35:06 AM	H2 MFC set to  0.000000
7/25/2011	8:35:06 AM	BCl3 MFC set to  0.000000
7/25/2011	8:35:06 AM	PHl3 MFC set to  0.000000
7/25/2011	8:35:06 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:35:06 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:35:06 AM	Tube furnace set to 0
7/25/2011	8:35:34 AM	Helium valve closed
7/25/2011	8:35:34 AM	H2 valve closed
7/25/2011	8:35:34 AM	BCl3 valve closed
7/25/2011	8:35:34 AM	PH3 valve closed
7/25/2011	8:35:34 AM	SiCl4 pre valve closed
7/25/2011	8:35:34 AM	SiCl4 post valve closed
7/25/2011	8:35:34 AM	Main Vac valve closed
7/25/2011	8:35:34 AM	Bypass valve closed
7/25/2011	8:35:34 AM	Bubbler valve closed
7/25/2011	8:35:34 AM	Helium MFC set to  0.000000
7/25/2011	8:35:34 AM	H2 MFC set to  0.000000
7/25/2011	8:35:34 AM	BCl3 MFC set to  0.000000
7/25/2011	8:35:35 AM	PHl3 MFC set to  0.000000
7/25/2011	8:35:35 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:35:35 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:35:35 AM	Tube furnace set to 0
7/25/2011	8:35:36 AM	Run finished at 8:35 AM
7/25/2011	8:35:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:36:14 AM	Helium MFC set to  20.000000
7/25/2011	8:36:18 AM	Helium valve opened
7/25/2011	8:36:40 AM	Helium valve closed
7/25/2011	8:36:48 AM	Helium MFC set to  1.000000
7/25/2011	8:36:52 AM	Helium MFC set to  0.000000
7/25/2011	8:41:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2011	8:41:02 AM	Recipe started at 8:41 AM
7/25/2011	8:41:02 AM	Helium valve closed
7/25/2011	8:41:02 AM	H2 valve closed
7/25/2011	8:41:02 AM	BCl3 valve closed
7/25/2011	8:41:02 AM	PH3 valve closed
7/25/2011	8:41:02 AM	SiCl4 pre valve closed
7/25/2011	8:41:02 AM	SiCl4 post valve closed
7/25/2011	8:41:02 AM	Main Vac valve closed
7/25/2011	8:41:02 AM	Bubbler valve closed
7/25/2011	8:41:02 AM	Bypass valve opened
7/25/2011	8:41:02 AM	Helium MFC set to  0.000000
7/25/2011	8:41:02 AM	H2 MFC set to  0.000000
7/25/2011	8:41:02 AM	BCl3 MFC set to  0.000000
7/25/2011	8:41:02 AM	PHl3 MFC set to  0.000000
7/25/2011	8:41:02 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:41:02 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:41:02 AM	Tube furnace set to 0
7/25/2011	8:42:09 AM	Helium valve closed
7/25/2011	8:42:09 AM	H2 valve closed
7/25/2011	8:42:09 AM	BCl3 valve closed
7/25/2011	8:42:09 AM	PH3 valve closed
7/25/2011	8:42:09 AM	SiCl4 pre valve closed
7/25/2011	8:42:09 AM	SiCl4 post valve closed
7/25/2011	8:42:09 AM	Main Vac valve closed
7/25/2011	8:42:09 AM	Bubbler valve closed
7/25/2011	8:42:09 AM	Bypass valve opened
7/25/2011	8:42:09 AM	Helium MFC set to  0.000000
7/25/2011	8:42:09 AM	H2 MFC set to  0.000000
7/25/2011	8:42:09 AM	BCl3 MFC set to  0.000000
7/25/2011	8:42:09 AM	PHl3 MFC set to  0.000000
7/25/2011	8:42:09 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:42:09 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:42:09 AM	Tube furnace set to 0
7/25/2011	8:43:09 AM	Helium valve closed
7/25/2011	8:43:09 AM	H2 valve closed
7/25/2011	8:43:09 AM	BCl3 valve closed
7/25/2011	8:43:09 AM	PH3 valve closed
7/25/2011	8:43:09 AM	SiCl4 pre valve closed
7/25/2011	8:43:09 AM	SiCl4 post valve closed
7/25/2011	8:43:09 AM	Bypass valve closed
7/25/2011	8:43:09 AM	Bubbler valve closed
7/25/2011	8:43:09 AM	Main Vac valve opened
7/25/2011	8:43:09 AM	Helium MFC set to  0.000000
7/25/2011	8:43:09 AM	H2 MFC set to  0.000000
7/25/2011	8:43:09 AM	BCl3 MFC set to  0.000000
7/25/2011	8:43:09 AM	PHl3 MFC set to  0.000000
7/25/2011	8:43:09 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:43:09 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:43:09 AM	Tube furnace set to 0
7/25/2011	8:43:10 AM	Run finished at 8:43 AM
7/25/2011	8:43:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2011	8:44:03 AM	Main Vac valve closed
7/25/2011	8:44:21 AM	Helium MFC set to  20.000000
7/25/2011	8:44:48 AM	Helium valve opened
7/25/2011	8:45:32 AM	Helium MFC set to  500.000000
7/25/2011	8:45:36 AM	Bypass valve opened
7/25/2011	8:45:36 AM	Bypass valve closed
7/25/2011	8:45:38 AM	Bypass valve opened
7/25/2011	8:47:35 AM	Bypass valve closed
7/25/2011	8:47:36 AM	Helium valve closed
7/25/2011	8:49:56 AM	Helium valve opened
7/25/2011	8:49:58 AM	Bypass valve opened
7/25/2011	8:51:43 AM	Helium valve closed
7/25/2011	8:51:45 AM	Bypass valve closed
7/25/2011	8:52:05 AM	Helium valve opened
7/25/2011	8:52:11 AM	Bypass valve opened
7/25/2011	8:53:47 AM	Helium valve closed
7/25/2011	8:53:50 AM	Bypass valve closed
7/25/2011	8:53:59 AM	Helium MFC set to  0.000000
7/25/2011	8:54:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:54:05 AM	Recipe started at 8:54 AM
7/25/2011	8:54:05 AM	Helium valve closed
7/25/2011	8:54:05 AM	H2 valve closed
7/25/2011	8:54:05 AM	BCl3 valve closed
7/25/2011	8:54:05 AM	PH3 valve closed
7/25/2011	8:54:05 AM	SiCl4 pre valve closed
7/25/2011	8:54:05 AM	SiCl4 post valve closed
7/25/2011	8:54:05 AM	Main Vac valve closed
7/25/2011	8:54:05 AM	Bypass valve closed
7/25/2011	8:54:05 AM	Bubbler valve closed
7/25/2011	8:54:05 AM	Helium MFC set to  0.000000
7/25/2011	8:54:05 AM	H2 MFC set to  0.000000
7/25/2011	8:54:05 AM	BCl3 MFC set to  0.000000
7/25/2011	8:54:05 AM	PHl3 MFC set to  0.000000
7/25/2011	8:54:05 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:54:05 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:54:05 AM	Tube furnace set to 0
7/25/2011	8:54:08 AM	H2 valve closed
7/25/2011	8:54:08 AM	BCl3 valve closed
7/25/2011	8:54:08 AM	PH3 valve closed
7/25/2011	8:54:08 AM	SiCl4 pre valve closed
7/25/2011	8:54:08 AM	SiCl4 post valve closed
7/25/2011	8:54:08 AM	Main Vac valve closed
7/25/2011	8:54:08 AM	Bypass valve closed
7/25/2011	8:54:08 AM	Bubbler valve closed
7/25/2011	8:54:08 AM	Helium valve opened
7/25/2011	8:54:08 AM	Helium MFC set to  500.000000
7/25/2011	8:54:08 AM	H2 MFC set to  0.000000
7/25/2011	8:54:08 AM	BCl3 MFC set to  0.000000
7/25/2011	8:54:08 AM	PHl3 MFC set to  0.000000
7/25/2011	8:54:08 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:54:08 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:54:08 AM	Tube furnace set to 0
7/25/2011	8:54:17 AM	Helium valve closed
7/25/2011	8:54:17 AM	H2 valve closed
7/25/2011	8:54:17 AM	BCl3 valve closed
7/25/2011	8:54:17 AM	PH3 valve closed
7/25/2011	8:54:17 AM	SiCl4 pre valve closed
7/25/2011	8:54:17 AM	SiCl4 post valve closed
7/25/2011	8:54:17 AM	Main Vac valve closed
7/25/2011	8:54:17 AM	Bypass valve closed
7/25/2011	8:54:17 AM	Bubbler valve closed
7/25/2011	8:54:17 AM	Helium MFC set to  0.000000
7/25/2011	8:54:17 AM	H2 MFC set to  0.000000
7/25/2011	8:54:17 AM	BCl3 MFC set to  0.000000
7/25/2011	8:54:17 AM	PHl3 MFC set to  0.000000
7/25/2011	8:54:17 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:54:17 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:54:17 AM	Tube furnace set to 0
7/25/2011	8:54:18 AM	Run finished at 8:54 AM
7/25/2011	8:54:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:54:43 AM	Bypass valve opened
7/25/2011	8:54:52 AM	Bypass valve closed
7/25/2011	8:55:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:55:01 AM	Recipe started at 8:55 AM
7/25/2011	8:55:01 AM	Helium valve closed
7/25/2011	8:55:01 AM	H2 valve closed
7/25/2011	8:55:01 AM	BCl3 valve closed
7/25/2011	8:55:01 AM	PH3 valve closed
7/25/2011	8:55:01 AM	SiCl4 pre valve closed
7/25/2011	8:55:01 AM	SiCl4 post valve closed
7/25/2011	8:55:01 AM	Main Vac valve closed
7/25/2011	8:55:01 AM	Bypass valve closed
7/25/2011	8:55:01 AM	Bubbler valve closed
7/25/2011	8:55:01 AM	Helium MFC set to  0.000000
7/25/2011	8:55:01 AM	H2 MFC set to  0.000000
7/25/2011	8:55:01 AM	BCl3 MFC set to  0.000000
7/25/2011	8:55:01 AM	PHl3 MFC set to  0.000000
7/25/2011	8:55:01 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:55:01 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:55:01 AM	Tube furnace set to 0
7/25/2011	8:55:04 AM	H2 valve closed
7/25/2011	8:55:04 AM	BCl3 valve closed
7/25/2011	8:55:04 AM	PH3 valve closed
7/25/2011	8:55:04 AM	SiCl4 pre valve closed
7/25/2011	8:55:04 AM	SiCl4 post valve closed
7/25/2011	8:55:04 AM	Main Vac valve closed
7/25/2011	8:55:04 AM	Bypass valve closed
7/25/2011	8:55:04 AM	Bubbler valve closed
7/25/2011	8:55:04 AM	Helium valve opened
7/25/2011	8:55:04 AM	Helium MFC set to  500.000000
7/25/2011	8:55:04 AM	H2 MFC set to  0.000000
7/25/2011	8:55:04 AM	BCl3 MFC set to  0.000000
7/25/2011	8:55:04 AM	PHl3 MFC set to  0.000000
7/25/2011	8:55:04 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:55:04 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:55:04 AM	Tube furnace set to 0
7/25/2011	8:55:58 AM	Helium valve closed
7/25/2011	8:55:58 AM	H2 valve closed
7/25/2011	8:55:58 AM	BCl3 valve closed
7/25/2011	8:55:58 AM	PH3 valve closed
7/25/2011	8:55:58 AM	SiCl4 pre valve closed
7/25/2011	8:55:58 AM	SiCl4 post valve closed
7/25/2011	8:55:58 AM	Main Vac valve closed
7/25/2011	8:55:58 AM	Bypass valve closed
7/25/2011	8:55:58 AM	Bubbler valve closed
7/25/2011	8:55:58 AM	Helium MFC set to  0.000000
7/25/2011	8:55:58 AM	H2 MFC set to  0.000000
7/25/2011	8:55:58 AM	BCl3 MFC set to  0.000000
7/25/2011	8:55:58 AM	PHl3 MFC set to  0.000000
7/25/2011	8:55:58 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:55:58 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:55:59 AM	Tube furnace set to 0
7/25/2011	8:56:00 AM	Run finished at 8:56 AM
7/25/2011	8:56:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:59:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2011	8:59:36 AM	Recipe started at 8:59 AM
7/25/2011	8:59:36 AM	Helium valve closed
7/25/2011	8:59:36 AM	H2 valve closed
7/25/2011	8:59:36 AM	BCl3 valve closed
7/25/2011	8:59:36 AM	PH3 valve closed
7/25/2011	8:59:36 AM	SiCl4 pre valve closed
7/25/2011	8:59:36 AM	SiCl4 post valve closed
7/25/2011	8:59:36 AM	Main Vac valve closed
7/25/2011	8:59:36 AM	Bubbler valve closed
7/25/2011	8:59:36 AM	Bypass valve opened
7/25/2011	8:59:36 AM	Helium MFC set to  0.000000
7/25/2011	8:59:36 AM	H2 MFC set to  0.000000
7/25/2011	8:59:36 AM	BCl3 MFC set to  0.000000
7/25/2011	8:59:36 AM	PHl3 MFC set to  0.000000
7/25/2011	8:59:36 AM	SiCl4 MFC set to  0.000000
7/25/2011	8:59:36 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:59:37 AM	Tube furnace set to 0
7/25/2011	9:00:39 AM	Helium valve closed
7/25/2011	9:00:39 AM	H2 valve closed
7/25/2011	9:00:39 AM	BCl3 valve closed
7/25/2011	9:00:39 AM	PH3 valve closed
7/25/2011	9:00:39 AM	SiCl4 pre valve closed
7/25/2011	9:00:39 AM	SiCl4 post valve closed
7/25/2011	9:00:39 AM	Main Vac valve closed
7/25/2011	9:00:39 AM	Bubbler valve closed
7/25/2011	9:00:39 AM	Bypass valve opened
7/25/2011	9:00:39 AM	Helium MFC set to  0.000000
7/25/2011	9:00:39 AM	H2 MFC set to  0.000000
7/25/2011	9:00:39 AM	BCl3 MFC set to  0.000000
7/25/2011	9:00:39 AM	PHl3 MFC set to  0.000000
7/25/2011	9:00:39 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:00:39 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:00:39 AM	Tube furnace set to 0
7/25/2011	9:01:39 AM	Helium valve closed
7/25/2011	9:01:39 AM	H2 valve closed
7/25/2011	9:01:39 AM	BCl3 valve closed
7/25/2011	9:01:39 AM	PH3 valve closed
7/25/2011	9:01:39 AM	SiCl4 pre valve closed
7/25/2011	9:01:39 AM	SiCl4 post valve closed
7/25/2011	9:01:39 AM	Bypass valve closed
7/25/2011	9:01:39 AM	Bubbler valve closed
7/25/2011	9:01:39 AM	Main Vac valve opened
7/25/2011	9:01:39 AM	Helium MFC set to  0.000000
7/25/2011	9:01:39 AM	H2 MFC set to  0.000000
7/25/2011	9:01:39 AM	BCl3 MFC set to  0.000000
7/25/2011	9:01:39 AM	PHl3 MFC set to  0.000000
7/25/2011	9:01:39 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:01:39 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:01:39 AM	Tube furnace set to 0
7/25/2011	9:01:40 AM	Run finished at 9:01 AM
7/25/2011	9:01:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2011	9:26:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/25/2011	9:26:48 AM	Recipe started at 9:26 AM
7/25/2011	9:26:48 AM	Helium valve closed
7/25/2011	9:26:48 AM	H2 valve closed
7/25/2011	9:26:48 AM	BCl3 valve closed
7/25/2011	9:26:48 AM	PH3 valve closed
7/25/2011	9:26:48 AM	SiCl4 pre valve closed
7/25/2011	9:26:48 AM	SiCl4 post valve closed
7/25/2011	9:26:48 AM	Main Vac valve closed
7/25/2011	9:26:48 AM	Bubbler valve closed
7/25/2011	9:26:48 AM	Bypass valve opened
7/25/2011	9:26:48 AM	Helium MFC set to  0.000000
7/25/2011	9:26:48 AM	H2 MFC set to  0.000000
7/25/2011	9:26:48 AM	BCl3 MFC set to  0.000000
7/25/2011	9:26:48 AM	PHl3 MFC set to  0.000000
7/25/2011	9:26:48 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:26:48 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:26:49 AM	Tube furnace set to 0
7/25/2011	9:26:49 AM	Helium valve closed
7/25/2011	9:26:49 AM	H2 valve closed
7/25/2011	9:26:49 AM	BCl3 valve closed
7/25/2011	9:26:49 AM	PH3 valve closed
7/25/2011	9:26:49 AM	SiCl4 pre valve closed
7/25/2011	9:26:49 AM	SiCl4 post valve closed
7/25/2011	9:26:49 AM	Main Vac valve closed
7/25/2011	9:26:49 AM	Bubbler valve closed
7/25/2011	9:26:49 AM	Bypass valve opened
7/25/2011	9:26:49 AM	Helium MFC set to  0.000000
7/25/2011	9:26:49 AM	H2 MFC set to  0.000000
7/25/2011	9:26:49 AM	BCl3 MFC set to  0.000000
7/25/2011	9:26:49 AM	PHl3 MFC set to  0.000000
7/25/2011	9:26:49 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:26:49 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:26:49 AM	Tube furnace set to 0
7/25/2011	9:27:19 AM	Helium valve closed
7/25/2011	9:27:19 AM	H2 valve closed
7/25/2011	9:27:19 AM	BCl3 valve closed
7/25/2011	9:27:19 AM	PH3 valve closed
7/25/2011	9:27:19 AM	SiCl4 pre valve closed
7/25/2011	9:27:19 AM	SiCl4 post valve closed
7/25/2011	9:27:19 AM	Bypass valve closed
7/25/2011	9:27:19 AM	Bubbler valve closed
7/25/2011	9:27:19 AM	Main Vac valve opened
7/25/2011	9:27:19 AM	Helium MFC set to  0.000000
7/25/2011	9:27:19 AM	H2 MFC set to  0.000000
7/25/2011	9:27:19 AM	BCl3 MFC set to  0.000000
7/25/2011	9:27:19 AM	PHl3 MFC set to  0.000000
7/25/2011	9:27:19 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:27:19 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:27:19 AM	Tube furnace set to 0
7/25/2011	9:27:49 AM	H2 valve closed
7/25/2011	9:27:49 AM	BCl3 valve closed
7/25/2011	9:27:49 AM	PH3 valve closed
7/25/2011	9:27:49 AM	SiCl4 pre valve closed
7/25/2011	9:27:49 AM	SiCl4 post valve closed
7/25/2011	9:27:49 AM	Bypass valve closed
7/25/2011	9:27:49 AM	Bubbler valve closed
7/25/2011	9:27:49 AM	Helium valve opened
7/25/2011	9:27:49 AM	Main Vac valve opened
7/25/2011	9:27:49 AM	Helium MFC set to  20.000000
7/25/2011	9:27:49 AM	H2 MFC set to  0.000000
7/25/2011	9:27:49 AM	BCl3 MFC set to  0.000000
7/25/2011	9:27:49 AM	PHl3 MFC set to  0.000000
7/25/2011	9:27:49 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:27:49 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:27:49 AM	Tube furnace set to 0
7/25/2011	9:28:19 AM	Helium valve closed
7/25/2011	9:28:19 AM	H2 valve closed
7/25/2011	9:28:19 AM	BCl3 valve closed
7/25/2011	9:28:19 AM	PH3 valve closed
7/25/2011	9:28:19 AM	SiCl4 pre valve closed
7/25/2011	9:28:19 AM	SiCl4 post valve closed
7/25/2011	9:28:19 AM	Bypass valve closed
7/25/2011	9:28:19 AM	Bubbler valve closed
7/25/2011	9:28:19 AM	Main Vac valve opened
7/25/2011	9:28:19 AM	Helium MFC set to  0.000000
7/25/2011	9:28:19 AM	H2 MFC set to  0.000000
7/25/2011	9:28:19 AM	BCl3 MFC set to  0.000000
7/25/2011	9:28:19 AM	PHl3 MFC set to  0.000000
7/25/2011	9:28:19 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:28:19 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:28:20 AM	Tube furnace set to 0
7/25/2011	9:28:50 AM	H2 valve closed
7/25/2011	9:28:50 AM	BCl3 valve closed
7/25/2011	9:28:50 AM	PH3 valve closed
7/25/2011	9:28:50 AM	SiCl4 pre valve closed
7/25/2011	9:28:50 AM	SiCl4 post valve closed
7/25/2011	9:28:50 AM	Bypass valve closed
7/25/2011	9:28:50 AM	Bubbler valve closed
7/25/2011	9:28:50 AM	Helium valve opened
7/25/2011	9:28:50 AM	Main Vac valve opened
7/25/2011	9:28:50 AM	Helium MFC set to  20.000000
7/25/2011	9:28:50 AM	H2 MFC set to  0.000000
7/25/2011	9:28:50 AM	BCl3 MFC set to  0.000000
7/25/2011	9:28:50 AM	PHl3 MFC set to  0.000000
7/25/2011	9:28:50 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:28:50 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:28:50 AM	Tube furnace set to 0
7/25/2011	9:29:20 AM	Helium valve closed
7/25/2011	9:29:20 AM	H2 valve closed
7/25/2011	9:29:20 AM	BCl3 valve closed
7/25/2011	9:29:20 AM	PH3 valve closed
7/25/2011	9:29:20 AM	SiCl4 pre valve closed
7/25/2011	9:29:20 AM	SiCl4 post valve closed
7/25/2011	9:29:20 AM	Bypass valve closed
7/25/2011	9:29:20 AM	Bubbler valve closed
7/25/2011	9:29:20 AM	Main Vac valve opened
7/25/2011	9:29:20 AM	Helium MFC set to  0.000000
7/25/2011	9:29:20 AM	H2 MFC set to  0.000000
7/25/2011	9:29:20 AM	BCl3 MFC set to  0.000000
7/25/2011	9:29:20 AM	PHl3 MFC set to  0.000000
7/25/2011	9:29:20 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:29:20 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:29:20 AM	Tube furnace set to 0
7/25/2011	9:29:50 AM	H2 valve closed
7/25/2011	9:29:50 AM	BCl3 valve closed
7/25/2011	9:29:50 AM	PH3 valve closed
7/25/2011	9:29:50 AM	SiCl4 pre valve closed
7/25/2011	9:29:50 AM	SiCl4 post valve closed
7/25/2011	9:29:50 AM	Bypass valve closed
7/25/2011	9:29:50 AM	Bubbler valve closed
7/25/2011	9:29:50 AM	Helium valve opened
7/25/2011	9:29:50 AM	Main Vac valve opened
7/25/2011	9:29:50 AM	Helium MFC set to  20.000000
7/25/2011	9:29:50 AM	H2 MFC set to  0.000000
7/25/2011	9:29:50 AM	BCl3 MFC set to  0.000000
7/25/2011	9:29:50 AM	PHl3 MFC set to  0.000000
7/25/2011	9:29:50 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:29:50 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:29:50 AM	Tube furnace set to 0
7/25/2011	9:30:20 AM	Helium valve closed
7/25/2011	9:30:20 AM	H2 valve closed
7/25/2011	9:30:20 AM	BCl3 valve closed
7/25/2011	9:30:20 AM	PH3 valve closed
7/25/2011	9:30:20 AM	SiCl4 pre valve closed
7/25/2011	9:30:20 AM	SiCl4 post valve closed
7/25/2011	9:30:20 AM	Bypass valve closed
7/25/2011	9:30:20 AM	Bubbler valve closed
7/25/2011	9:30:20 AM	Main Vac valve opened
7/25/2011	9:30:20 AM	Helium MFC set to  0.000000
7/25/2011	9:30:20 AM	H2 MFC set to  0.000000
7/25/2011	9:30:20 AM	BCl3 MFC set to  0.000000
7/25/2011	9:30:20 AM	PHl3 MFC set to  0.000000
7/25/2011	9:30:20 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:30:20 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:30:20 AM	Tube furnace set to 0
7/25/2011	9:30:50 AM	H2 valve closed
7/25/2011	9:30:50 AM	BCl3 valve closed
7/25/2011	9:30:50 AM	PH3 valve closed
7/25/2011	9:30:50 AM	SiCl4 pre valve closed
7/25/2011	9:30:50 AM	SiCl4 post valve closed
7/25/2011	9:30:50 AM	Bypass valve closed
7/25/2011	9:30:50 AM	Bubbler valve closed
7/25/2011	9:30:50 AM	Helium valve opened
7/25/2011	9:30:50 AM	Main Vac valve opened
7/25/2011	9:30:50 AM	Helium MFC set to  20.000000
7/25/2011	9:30:50 AM	H2 MFC set to  0.000000
7/25/2011	9:30:50 AM	BCl3 MFC set to  0.000000
7/25/2011	9:30:50 AM	PHl3 MFC set to  0.000000
7/25/2011	9:30:50 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:30:50 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:30:51 AM	Tube furnace set to 0
7/25/2011	9:31:21 AM	Helium valve closed
7/25/2011	9:31:21 AM	H2 valve closed
7/25/2011	9:31:21 AM	BCl3 valve closed
7/25/2011	9:31:21 AM	PH3 valve closed
7/25/2011	9:31:21 AM	SiCl4 pre valve closed
7/25/2011	9:31:21 AM	SiCl4 post valve closed
7/25/2011	9:31:21 AM	Bypass valve closed
7/25/2011	9:31:21 AM	Bubbler valve closed
7/25/2011	9:31:21 AM	Main Vac valve opened
7/25/2011	9:31:21 AM	Helium MFC set to  0.000000
7/25/2011	9:31:21 AM	H2 MFC set to  0.000000
7/25/2011	9:31:21 AM	BCl3 MFC set to  0.000000
7/25/2011	9:31:21 AM	PHl3 MFC set to  0.000000
7/25/2011	9:31:21 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:31:21 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:31:21 AM	Tube furnace set to 0
7/25/2011	9:31:51 AM	H2 valve closed
7/25/2011	9:31:51 AM	BCl3 valve closed
7/25/2011	9:31:51 AM	PH3 valve closed
7/25/2011	9:31:51 AM	SiCl4 pre valve closed
7/25/2011	9:31:51 AM	SiCl4 post valve closed
7/25/2011	9:31:51 AM	Bypass valve closed
7/25/2011	9:31:51 AM	Bubbler valve closed
7/25/2011	9:31:51 AM	Helium valve opened
7/25/2011	9:31:51 AM	Main Vac valve opened
7/25/2011	9:31:51 AM	Helium MFC set to  20.000000
7/25/2011	9:31:51 AM	H2 MFC set to  0.000000
7/25/2011	9:31:51 AM	BCl3 MFC set to  0.000000
7/25/2011	9:31:51 AM	PHl3 MFC set to  0.000000
7/25/2011	9:31:51 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:31:51 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:31:51 AM	Tube furnace set to 0
7/25/2011	9:32:21 AM	Helium valve closed
7/25/2011	9:32:21 AM	H2 valve closed
7/25/2011	9:32:21 AM	BCl3 valve closed
7/25/2011	9:32:21 AM	PH3 valve closed
7/25/2011	9:32:21 AM	SiCl4 pre valve closed
7/25/2011	9:32:21 AM	SiCl4 post valve closed
7/25/2011	9:32:21 AM	Bypass valve closed
7/25/2011	9:32:21 AM	Bubbler valve closed
7/25/2011	9:32:21 AM	Main Vac valve opened
7/25/2011	9:32:21 AM	Helium MFC set to  0.000000
7/25/2011	9:32:21 AM	H2 MFC set to  0.000000
7/25/2011	9:32:21 AM	BCl3 MFC set to  0.000000
7/25/2011	9:32:21 AM	PHl3 MFC set to  0.000000
7/25/2011	9:32:21 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:32:21 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:32:21 AM	Tube furnace set to 0
7/25/2011	9:32:51 AM	H2 valve closed
7/25/2011	9:32:51 AM	BCl3 valve closed
7/25/2011	9:32:51 AM	PH3 valve closed
7/25/2011	9:32:51 AM	SiCl4 pre valve closed
7/25/2011	9:32:51 AM	SiCl4 post valve closed
7/25/2011	9:32:51 AM	Bypass valve closed
7/25/2011	9:32:51 AM	Bubbler valve closed
7/25/2011	9:32:51 AM	Helium valve opened
7/25/2011	9:32:51 AM	Main Vac valve opened
7/25/2011	9:32:51 AM	Helium MFC set to  20.000000
7/25/2011	9:32:51 AM	H2 MFC set to  0.000000
7/25/2011	9:32:51 AM	BCl3 MFC set to  0.000000
7/25/2011	9:32:51 AM	PHl3 MFC set to  0.000000
7/25/2011	9:32:51 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:32:51 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:32:51 AM	Tube furnace set to 0
7/25/2011	9:33:21 AM	Helium valve closed
7/25/2011	9:33:21 AM	H2 valve closed
7/25/2011	9:33:21 AM	BCl3 valve closed
7/25/2011	9:33:21 AM	PH3 valve closed
7/25/2011	9:33:21 AM	SiCl4 pre valve closed
7/25/2011	9:33:21 AM	SiCl4 post valve closed
7/25/2011	9:33:21 AM	Bypass valve closed
7/25/2011	9:33:21 AM	Bubbler valve closed
7/25/2011	9:33:21 AM	Main Vac valve opened
7/25/2011	9:33:21 AM	Helium MFC set to  0.000000
7/25/2011	9:33:21 AM	H2 MFC set to  0.000000
7/25/2011	9:33:21 AM	BCl3 MFC set to  0.000000
7/25/2011	9:33:21 AM	PHl3 MFC set to  0.000000
7/25/2011	9:33:21 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:33:21 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:33:22 AM	Tube furnace set to 0
7/25/2011	9:33:52 AM	H2 valve closed
7/25/2011	9:33:52 AM	BCl3 valve closed
7/25/2011	9:33:52 AM	PH3 valve closed
7/25/2011	9:33:52 AM	SiCl4 pre valve closed
7/25/2011	9:33:52 AM	SiCl4 post valve closed
7/25/2011	9:33:52 AM	Bypass valve closed
7/25/2011	9:33:52 AM	Bubbler valve closed
7/25/2011	9:33:52 AM	Helium valve opened
7/25/2011	9:33:52 AM	Main Vac valve opened
7/25/2011	9:33:52 AM	Helium MFC set to  20.000000
7/25/2011	9:33:52 AM	H2 MFC set to  0.000000
7/25/2011	9:33:52 AM	BCl3 MFC set to  0.000000
7/25/2011	9:33:52 AM	PHl3 MFC set to  0.000000
7/25/2011	9:33:52 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:33:52 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:33:52 AM	Tube furnace set to 0
7/25/2011	9:34:22 AM	Helium valve closed
7/25/2011	9:34:22 AM	H2 valve closed
7/25/2011	9:34:22 AM	BCl3 valve closed
7/25/2011	9:34:22 AM	PH3 valve closed
7/25/2011	9:34:22 AM	SiCl4 pre valve closed
7/25/2011	9:34:22 AM	SiCl4 post valve closed
7/25/2011	9:34:22 AM	Bypass valve closed
7/25/2011	9:34:22 AM	Bubbler valve closed
7/25/2011	9:34:22 AM	Main Vac valve opened
7/25/2011	9:34:22 AM	Helium MFC set to  0.000000
7/25/2011	9:34:22 AM	H2 MFC set to  0.000000
7/25/2011	9:34:22 AM	BCl3 MFC set to  0.000000
7/25/2011	9:34:22 AM	PHl3 MFC set to  0.000000
7/25/2011	9:34:22 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:34:22 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:34:22 AM	Tube furnace set to 0
7/25/2011	9:34:52 AM	H2 valve closed
7/25/2011	9:34:52 AM	BCl3 valve closed
7/25/2011	9:34:52 AM	PH3 valve closed
7/25/2011	9:34:52 AM	SiCl4 pre valve closed
7/25/2011	9:34:52 AM	SiCl4 post valve closed
7/25/2011	9:34:52 AM	Bypass valve closed
7/25/2011	9:34:52 AM	Bubbler valve closed
7/25/2011	9:34:52 AM	Helium valve opened
7/25/2011	9:34:52 AM	Main Vac valve opened
7/25/2011	9:34:52 AM	Helium MFC set to  20.000000
7/25/2011	9:34:52 AM	H2 MFC set to  0.000000
7/25/2011	9:34:52 AM	BCl3 MFC set to  0.000000
7/25/2011	9:34:52 AM	PHl3 MFC set to  0.000000
7/25/2011	9:34:52 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:34:52 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:34:52 AM	Tube furnace set to 0
7/25/2011	9:35:22 AM	Helium valve closed
7/25/2011	9:35:22 AM	H2 valve closed
7/25/2011	9:35:22 AM	BCl3 valve closed
7/25/2011	9:35:22 AM	PH3 valve closed
7/25/2011	9:35:22 AM	SiCl4 pre valve closed
7/25/2011	9:35:22 AM	SiCl4 post valve closed
7/25/2011	9:35:22 AM	Bypass valve closed
7/25/2011	9:35:22 AM	Bubbler valve closed
7/25/2011	9:35:22 AM	Main Vac valve opened
7/25/2011	9:35:22 AM	Helium MFC set to  0.000000
7/25/2011	9:35:22 AM	H2 MFC set to  0.000000
7/25/2011	9:35:22 AM	BCl3 MFC set to  0.000000
7/25/2011	9:35:22 AM	PHl3 MFC set to  0.000000
7/25/2011	9:35:22 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:35:22 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:35:22 AM	Tube furnace set to 0
7/25/2011	9:35:52 AM	H2 valve closed
7/25/2011	9:35:52 AM	BCl3 valve closed
7/25/2011	9:35:52 AM	PH3 valve closed
7/25/2011	9:35:52 AM	SiCl4 pre valve closed
7/25/2011	9:35:52 AM	SiCl4 post valve closed
7/25/2011	9:35:52 AM	Bypass valve closed
7/25/2011	9:35:52 AM	Bubbler valve closed
7/25/2011	9:35:52 AM	Helium valve opened
7/25/2011	9:35:52 AM	Main Vac valve opened
7/25/2011	9:35:52 AM	Helium MFC set to  20.000000
7/25/2011	9:35:52 AM	H2 MFC set to  0.000000
7/25/2011	9:35:52 AM	BCl3 MFC set to  0.000000
7/25/2011	9:35:52 AM	PHl3 MFC set to  0.000000
7/25/2011	9:35:52 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:35:53 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:35:53 AM	Tube furnace set to 0
7/25/2011	9:36:23 AM	Helium valve closed
7/25/2011	9:36:23 AM	H2 valve closed
7/25/2011	9:36:23 AM	BCl3 valve closed
7/25/2011	9:36:23 AM	PH3 valve closed
7/25/2011	9:36:23 AM	SiCl4 pre valve closed
7/25/2011	9:36:23 AM	SiCl4 post valve closed
7/25/2011	9:36:23 AM	Bypass valve closed
7/25/2011	9:36:23 AM	Bubbler valve closed
7/25/2011	9:36:23 AM	Main Vac valve opened
7/25/2011	9:36:23 AM	Helium MFC set to  0.000000
7/25/2011	9:36:23 AM	H2 MFC set to  0.000000
7/25/2011	9:36:23 AM	BCl3 MFC set to  0.000000
7/25/2011	9:36:23 AM	PHl3 MFC set to  0.000000
7/25/2011	9:36:23 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:36:23 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:36:23 AM	Tube furnace set to 0
7/25/2011	9:36:53 AM	H2 valve closed
7/25/2011	9:36:53 AM	BCl3 valve closed
7/25/2011	9:36:53 AM	PH3 valve closed
7/25/2011	9:36:53 AM	SiCl4 pre valve closed
7/25/2011	9:36:53 AM	SiCl4 post valve closed
7/25/2011	9:36:53 AM	Bypass valve closed
7/25/2011	9:36:53 AM	Bubbler valve closed
7/25/2011	9:36:53 AM	Helium valve opened
7/25/2011	9:36:53 AM	Main Vac valve opened
7/25/2011	9:36:53 AM	Helium MFC set to  20.000000
7/25/2011	9:36:53 AM	H2 MFC set to  0.000000
7/25/2011	9:36:53 AM	BCl3 MFC set to  0.000000
7/25/2011	9:36:53 AM	PHl3 MFC set to  0.000000
7/25/2011	9:36:53 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:36:53 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:36:53 AM	Tube furnace set to 0
7/25/2011	9:37:23 AM	Helium valve closed
7/25/2011	9:37:23 AM	H2 valve closed
7/25/2011	9:37:23 AM	BCl3 valve closed
7/25/2011	9:37:23 AM	PH3 valve closed
7/25/2011	9:37:23 AM	SiCl4 pre valve closed
7/25/2011	9:37:23 AM	SiCl4 post valve closed
7/25/2011	9:37:23 AM	Bypass valve closed
7/25/2011	9:37:23 AM	Bubbler valve closed
7/25/2011	9:37:23 AM	Main Vac valve opened
7/25/2011	9:37:23 AM	Helium MFC set to  0.000000
7/25/2011	9:37:23 AM	H2 MFC set to  0.000000
7/25/2011	9:37:23 AM	BCl3 MFC set to  0.000000
7/25/2011	9:37:23 AM	PHl3 MFC set to  0.000000
7/25/2011	9:37:23 AM	SiCl4 MFC set to  0.000000
7/25/2011	9:37:23 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:37:23 AM	Tube furnace set to 0
7/25/2011	9:37:24 AM	Run finished at 9:37 AM
7/25/2011	9:37:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/25/2011	10:30:33 AM	Main Vac valve closed
7/25/2011	10:30:49 AM	Main Vac valve opened
7/25/2011	10:31:12 AM	Recipe started at 10:31 AM
7/25/2011	10:31:12 AM	Helium valve closed
7/25/2011	10:31:12 AM	H2 valve closed
7/25/2011	10:31:12 AM	BCl3 valve closed
7/25/2011	10:31:12 AM	PH3 valve closed
7/25/2011	10:31:12 AM	SiCl4 pre valve closed
7/25/2011	10:31:12 AM	SiCl4 post valve closed
7/25/2011	10:31:12 AM	Main Vac valve closed
7/25/2011	10:31:12 AM	Bypass valve closed
7/25/2011	10:31:12 AM	Bubbler valve closed
7/25/2011	10:31:12 AM	Helium MFC set to  0.000000
7/25/2011	10:31:12 AM	H2 MFC set to  0.000000
7/25/2011	10:31:12 AM	BCl3 MFC set to  0.000000
7/25/2011	10:31:12 AM	PHl3 MFC set to  0.000000
7/25/2011	10:31:12 AM	SiCl4 MFC set to  0.000000
7/25/2011	10:31:12 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:31:12 AM	Tube furnace set to 0
7/25/2011	10:31:15 AM	Helium valve closed
7/25/2011	10:31:15 AM	BCl3 valve closed
7/25/2011	10:31:15 AM	PH3 valve closed
7/25/2011	10:31:15 AM	SiCl4 pre valve closed
7/25/2011	10:31:15 AM	SiCl4 post valve closed
7/25/2011	10:31:15 AM	Main Vac valve closed
7/25/2011	10:31:15 AM	Bypass valve closed
7/25/2011	10:31:15 AM	Bubbler valve closed
7/25/2011	10:31:15 AM	H2 valve opened
7/25/2011	10:31:15 AM	Helium MFC set to  0.000000
7/25/2011	10:31:15 AM	H2 MFC set to  500.000000
7/25/2011	10:31:15 AM	BCl3 MFC set to  0.000000
7/25/2011	10:31:15 AM	PHl3 MFC set to  0.000000
7/25/2011	10:31:15 AM	SiCl4 MFC set to  0.000000
7/25/2011	10:31:15 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:31:15 AM	Tube furnace set to 0
7/25/2011	10:32:23 AM	Helium valve closed
7/25/2011	10:32:23 AM	BCl3 valve closed
7/25/2011	10:32:23 AM	PH3 valve closed
7/25/2011	10:32:23 AM	SiCl4 pre valve closed
7/25/2011	10:32:23 AM	SiCl4 post valve closed
7/25/2011	10:32:23 AM	Main Vac valve closed
7/25/2011	10:32:23 AM	Bypass valve closed
7/25/2011	10:32:23 AM	H2 valve opened
7/25/2011	10:32:23 AM	Bubbler valve opened
7/25/2011	10:32:23 AM	Helium MFC set to  0.000000
7/25/2011	10:32:23 AM	H2 MFC set to  500.000000
7/25/2011	10:32:23 AM	BCl3 MFC set to  0.000000
7/25/2011	10:32:23 AM	PHl3 MFC set to  0.000000
7/25/2011	10:32:23 AM	SiCl4 MFC set to  0.000000
7/25/2011	10:32:23 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:32:23 AM	Tube furnace set to 0
7/25/2011	10:32:24 AM	Helium valve closed
7/25/2011	10:32:24 AM	BCl3 valve closed
7/25/2011	10:32:24 AM	PH3 valve closed
7/25/2011	10:32:24 AM	SiCl4 pre valve closed
7/25/2011	10:32:24 AM	SiCl4 post valve closed
7/25/2011	10:32:24 AM	Main Vac valve closed
7/25/2011	10:32:24 AM	Bypass valve closed
7/25/2011	10:32:24 AM	H2 valve opened
7/25/2011	10:32:24 AM	Bubbler valve opened
7/25/2011	10:32:24 AM	Helium MFC set to  0.000000
7/25/2011	10:32:24 AM	H2 MFC set to  500.000000
7/25/2011	10:32:24 AM	BCl3 MFC set to  0.000000
7/25/2011	10:32:24 AM	PHl3 MFC set to  0.000000
7/25/2011	10:32:24 AM	SiCl4 MFC set to  0.000000
7/25/2011	10:32:24 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:32:24 AM	Tube furnace set to 1000
7/25/2011	10:52:24 AM	Helium valve closed
7/25/2011	10:52:24 AM	PH3 valve closed
7/25/2011	10:52:24 AM	Main Vac valve closed
7/25/2011	10:52:24 AM	Bypass valve closed
7/25/2011	10:52:24 AM	H2 valve opened
7/25/2011	10:52:24 AM	BCl3 valve opened
7/25/2011	10:52:24 AM	SiCl4 pre valve opened
7/25/2011	10:52:24 AM	SiCl4 post valve opened
7/25/2011	10:52:24 AM	Bubbler valve opened
7/25/2011	10:52:24 AM	Helium MFC set to  0.000000
7/25/2011	10:52:24 AM	H2 MFC set to  500.000000
7/25/2011	10:52:24 AM	BCl3 MFC set to  6.000000
7/25/2011	10:52:24 AM	PHl3 MFC set to  0.000000
7/25/2011	10:52:24 AM	SiCl4 MFC set to  50.000000
7/25/2011	10:52:24 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:52:24 AM	Tube furnace set to 1000
7/25/2011	11:07:24 AM	Helium valve closed
7/25/2011	11:07:24 AM	BCl3 valve closed
7/25/2011	11:07:24 AM	PH3 valve closed
7/25/2011	11:07:24 AM	SiCl4 pre valve closed
7/25/2011	11:07:24 AM	SiCl4 post valve closed
7/25/2011	11:07:24 AM	Main Vac valve closed
7/25/2011	11:07:24 AM	Bypass valve closed
7/25/2011	11:07:24 AM	H2 valve opened
7/25/2011	11:07:24 AM	Bubbler valve opened
7/25/2011	11:07:24 AM	Helium MFC set to  0.000000
7/25/2011	11:07:24 AM	H2 MFC set to  500.000000
7/25/2011	11:07:24 AM	BCl3 MFC set to  0.000000
7/25/2011	11:07:24 AM	PHl3 MFC set to  0.000000
7/25/2011	11:07:24 AM	SiCl4 MFC set to  0.000000
7/25/2011	11:07:24 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:07:24 AM	Tube furnace set to 750
7/25/2011	11:12:24 AM	H2 valve closed
7/25/2011	11:12:24 AM	BCl3 valve closed
7/25/2011	11:12:24 AM	PH3 valve closed
7/25/2011	11:12:24 AM	SiCl4 pre valve closed
7/25/2011	11:12:24 AM	SiCl4 post valve closed
7/25/2011	11:12:24 AM	Main Vac valve closed
7/25/2011	11:12:24 AM	Bypass valve closed
7/25/2011	11:12:24 AM	Helium valve opened
7/25/2011	11:12:24 AM	Bubbler valve opened
7/25/2011	11:12:24 AM	Helium MFC set to  500.000000
7/25/2011	11:12:24 AM	H2 MFC set to  0.000000
7/25/2011	11:12:24 AM	BCl3 MFC set to  0.000000
7/25/2011	11:12:24 AM	PHl3 MFC set to  0.000000
7/25/2011	11:12:24 AM	SiCl4 MFC set to  0.000000
7/25/2011	11:12:24 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:12:25 AM	Tube furnace set to 0
7/25/2011	11:32:25 AM	Helium valve closed
7/25/2011	11:32:25 AM	H2 valve closed
7/25/2011	11:32:25 AM	BCl3 valve closed
7/25/2011	11:32:25 AM	PH3 valve closed
7/25/2011	11:32:25 AM	SiCl4 pre valve closed
7/25/2011	11:32:25 AM	SiCl4 post valve closed
7/25/2011	11:32:25 AM	Main Vac valve closed
7/25/2011	11:32:25 AM	Bypass valve closed
7/25/2011	11:32:25 AM	Bubbler valve closed
7/25/2011	11:32:25 AM	Helium MFC set to  0.000000
7/25/2011	11:32:25 AM	H2 MFC set to  0.000000
7/25/2011	11:32:25 AM	BCl3 MFC set to  0.000000
7/25/2011	11:32:25 AM	PHl3 MFC set to  0.000000
7/25/2011	11:32:25 AM	SiCl4 MFC set to  0.000000
7/25/2011	11:32:25 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:32:25 AM	Tube furnace set to 0
7/25/2011	11:32:26 AM	Run finished at 11:32 AM
7/25/2011	11:54:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	11:54:36 AM	Recipe started at 11:54 AM
7/25/2011	11:54:36 AM	Helium valve closed
7/25/2011	11:54:36 AM	H2 valve closed
7/25/2011	11:54:36 AM	BCl3 valve closed
7/25/2011	11:54:36 AM	PH3 valve closed
7/25/2011	11:54:36 AM	SiCl4 pre valve closed
7/25/2011	11:54:36 AM	SiCl4 post valve closed
7/25/2011	11:54:36 AM	Main Vac valve closed
7/25/2011	11:54:36 AM	Bypass valve closed
7/25/2011	11:54:36 AM	Bubbler valve closed
7/25/2011	11:54:36 AM	Helium MFC set to  0.000000
7/25/2011	11:54:36 AM	H2 MFC set to  0.000000
7/25/2011	11:54:36 AM	BCl3 MFC set to  0.000000
7/25/2011	11:54:36 AM	PHl3 MFC set to  0.000000
7/25/2011	11:54:36 AM	SiCl4 MFC set to  0.000000
7/25/2011	11:54:36 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:54:36 AM	Tube furnace set to 0
7/25/2011	11:54:39 AM	H2 valve closed
7/25/2011	11:54:39 AM	BCl3 valve closed
7/25/2011	11:54:39 AM	PH3 valve closed
7/25/2011	11:54:39 AM	SiCl4 pre valve closed
7/25/2011	11:54:39 AM	SiCl4 post valve closed
7/25/2011	11:54:39 AM	Main Vac valve closed
7/25/2011	11:54:39 AM	Bypass valve closed
7/25/2011	11:54:39 AM	Bubbler valve closed
7/25/2011	11:54:39 AM	Helium valve opened
7/25/2011	11:54:39 AM	Helium MFC set to  500.000000
7/25/2011	11:54:39 AM	H2 MFC set to  0.000000
7/25/2011	11:54:39 AM	BCl3 MFC set to  0.000000
7/25/2011	11:54:39 AM	PHl3 MFC set to  0.000000
7/25/2011	11:54:39 AM	SiCl4 MFC set to  0.000000
7/25/2011	11:54:39 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:54:40 AM	Tube furnace set to 0
7/25/2011	11:54:46 AM	Helium valve closed
7/25/2011	11:54:46 AM	H2 valve closed
7/25/2011	11:54:46 AM	BCl3 valve closed
7/25/2011	11:54:46 AM	PH3 valve closed
7/25/2011	11:54:46 AM	SiCl4 pre valve closed
7/25/2011	11:54:46 AM	SiCl4 post valve closed
7/25/2011	11:54:46 AM	Main Vac valve closed
7/25/2011	11:54:46 AM	Bypass valve closed
7/25/2011	11:54:46 AM	Bubbler valve closed
7/25/2011	11:54:46 AM	Helium MFC set to  0.000000
7/25/2011	11:54:46 AM	H2 MFC set to  0.000000
7/25/2011	11:54:46 AM	BCl3 MFC set to  0.000000
7/25/2011	11:54:46 AM	PHl3 MFC set to  0.000000
7/25/2011	11:54:46 AM	SiCl4 MFC set to  0.000000
7/25/2011	11:54:46 AM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:54:46 AM	Tube furnace set to 0
7/25/2011	11:54:47 AM	Run finished at 11:54 AM
7/25/2011	11:54:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	12:01:54 PM	Recipe started at 12:01 PM
7/25/2011	12:01:54 PM	Helium valve closed
7/25/2011	12:01:54 PM	H2 valve closed
7/25/2011	12:01:54 PM	BCl3 valve closed
7/25/2011	12:01:54 PM	PH3 valve closed
7/25/2011	12:01:54 PM	SiCl4 pre valve closed
7/25/2011	12:01:54 PM	SiCl4 post valve closed
7/25/2011	12:01:54 PM	Main Vac valve closed
7/25/2011	12:01:54 PM	Bubbler valve closed
7/25/2011	12:01:54 PM	Bypass valve opened
7/25/2011	12:01:54 PM	Helium MFC set to  0.000000
7/25/2011	12:01:54 PM	H2 MFC set to  0.000000
7/25/2011	12:01:54 PM	BCl3 MFC set to  0.000000
7/25/2011	12:01:54 PM	PHl3 MFC set to  0.000000
7/25/2011	12:01:54 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:01:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:01:55 PM	Tube furnace set to 0
7/25/2011	12:02:57 PM	Helium valve closed
7/25/2011	12:02:57 PM	H2 valve closed
7/25/2011	12:02:57 PM	BCl3 valve closed
7/25/2011	12:02:57 PM	PH3 valve closed
7/25/2011	12:02:57 PM	SiCl4 pre valve closed
7/25/2011	12:02:57 PM	SiCl4 post valve closed
7/25/2011	12:02:57 PM	Main Vac valve closed
7/25/2011	12:02:57 PM	Bubbler valve closed
7/25/2011	12:02:57 PM	Bypass valve opened
7/25/2011	12:02:57 PM	Helium MFC set to  0.000000
7/25/2011	12:02:57 PM	H2 MFC set to  0.000000
7/25/2011	12:02:57 PM	BCl3 MFC set to  0.000000
7/25/2011	12:02:57 PM	PHl3 MFC set to  0.000000
7/25/2011	12:02:57 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:02:57 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:02:57 PM	Tube furnace set to 0
7/25/2011	12:03:27 PM	Helium valve closed
7/25/2011	12:03:27 PM	H2 valve closed
7/25/2011	12:03:27 PM	BCl3 valve closed
7/25/2011	12:03:27 PM	PH3 valve closed
7/25/2011	12:03:27 PM	SiCl4 pre valve closed
7/25/2011	12:03:27 PM	SiCl4 post valve closed
7/25/2011	12:03:27 PM	Bypass valve closed
7/25/2011	12:03:27 PM	Bubbler valve closed
7/25/2011	12:03:27 PM	Main Vac valve opened
7/25/2011	12:03:27 PM	Helium MFC set to  0.000000
7/25/2011	12:03:27 PM	H2 MFC set to  0.000000
7/25/2011	12:03:27 PM	BCl3 MFC set to  0.000000
7/25/2011	12:03:27 PM	PHl3 MFC set to  0.000000
7/25/2011	12:03:27 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:03:27 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:03:27 PM	Tube furnace set to 0
7/25/2011	12:33:27 PM	H2 valve closed
7/25/2011	12:33:27 PM	BCl3 valve closed
7/25/2011	12:33:27 PM	PH3 valve closed
7/25/2011	12:33:27 PM	SiCl4 pre valve closed
7/25/2011	12:33:27 PM	SiCl4 post valve closed
7/25/2011	12:33:27 PM	Bypass valve closed
7/25/2011	12:33:27 PM	Bubbler valve closed
7/25/2011	12:33:27 PM	Helium valve opened
7/25/2011	12:33:27 PM	Main Vac valve opened
7/25/2011	12:33:27 PM	Helium MFC set to  20.000000
7/25/2011	12:33:27 PM	H2 MFC set to  0.000000
7/25/2011	12:33:27 PM	BCl3 MFC set to  0.000000
7/25/2011	12:33:27 PM	PHl3 MFC set to  0.000000
7/25/2011	12:33:27 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:33:27 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:33:27 PM	Tube furnace set to 0
7/25/2011	12:33:58 PM	Helium valve closed
7/25/2011	12:33:58 PM	H2 valve closed
7/25/2011	12:33:58 PM	BCl3 valve closed
7/25/2011	12:33:58 PM	PH3 valve closed
7/25/2011	12:33:58 PM	SiCl4 pre valve closed
7/25/2011	12:33:58 PM	SiCl4 post valve closed
7/25/2011	12:33:58 PM	Bypass valve closed
7/25/2011	12:33:58 PM	Bubbler valve closed
7/25/2011	12:33:58 PM	Main Vac valve opened
7/25/2011	12:33:58 PM	Helium MFC set to  0.000000
7/25/2011	12:33:58 PM	H2 MFC set to  0.000000
7/25/2011	12:33:58 PM	BCl3 MFC set to  0.000000
7/25/2011	12:33:58 PM	PHl3 MFC set to  0.000000
7/25/2011	12:33:58 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:33:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:33:58 PM	Tube furnace set to 0
7/25/2011	12:34:28 PM	H2 valve closed
7/25/2011	12:34:28 PM	BCl3 valve closed
7/25/2011	12:34:28 PM	PH3 valve closed
7/25/2011	12:34:28 PM	SiCl4 pre valve closed
7/25/2011	12:34:28 PM	SiCl4 post valve closed
7/25/2011	12:34:28 PM	Bypass valve closed
7/25/2011	12:34:28 PM	Bubbler valve closed
7/25/2011	12:34:28 PM	Helium valve opened
7/25/2011	12:34:28 PM	Main Vac valve opened
7/25/2011	12:34:28 PM	Helium MFC set to  20.000000
7/25/2011	12:34:28 PM	H2 MFC set to  0.000000
7/25/2011	12:34:28 PM	BCl3 MFC set to  0.000000
7/25/2011	12:34:28 PM	PHl3 MFC set to  0.000000
7/25/2011	12:34:28 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:34:28 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:34:28 PM	Tube furnace set to 0
7/25/2011	12:34:58 PM	Helium valve closed
7/25/2011	12:34:58 PM	H2 valve closed
7/25/2011	12:34:58 PM	BCl3 valve closed
7/25/2011	12:34:58 PM	PH3 valve closed
7/25/2011	12:34:58 PM	SiCl4 pre valve closed
7/25/2011	12:34:58 PM	SiCl4 post valve closed
7/25/2011	12:34:58 PM	Bypass valve closed
7/25/2011	12:34:58 PM	Bubbler valve closed
7/25/2011	12:34:58 PM	Main Vac valve opened
7/25/2011	12:34:58 PM	Helium MFC set to  0.000000
7/25/2011	12:34:58 PM	H2 MFC set to  0.000000
7/25/2011	12:34:58 PM	BCl3 MFC set to  0.000000
7/25/2011	12:34:58 PM	PHl3 MFC set to  0.000000
7/25/2011	12:34:58 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:34:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:34:58 PM	Tube furnace set to 0
7/25/2011	12:35:28 PM	H2 valve closed
7/25/2011	12:35:28 PM	BCl3 valve closed
7/25/2011	12:35:28 PM	PH3 valve closed
7/25/2011	12:35:28 PM	SiCl4 pre valve closed
7/25/2011	12:35:28 PM	SiCl4 post valve closed
7/25/2011	12:35:28 PM	Bypass valve closed
7/25/2011	12:35:28 PM	Bubbler valve closed
7/25/2011	12:35:28 PM	Helium valve opened
7/25/2011	12:35:28 PM	Main Vac valve opened
7/25/2011	12:35:28 PM	Helium MFC set to  20.000000
7/25/2011	12:35:28 PM	H2 MFC set to  0.000000
7/25/2011	12:35:28 PM	BCl3 MFC set to  0.000000
7/25/2011	12:35:28 PM	PHl3 MFC set to  0.000000
7/25/2011	12:35:28 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:35:28 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:35:28 PM	Tube furnace set to 0
7/25/2011	12:35:58 PM	Helium valve closed
7/25/2011	12:35:58 PM	H2 valve closed
7/25/2011	12:35:58 PM	BCl3 valve closed
7/25/2011	12:35:58 PM	PH3 valve closed
7/25/2011	12:35:58 PM	SiCl4 pre valve closed
7/25/2011	12:35:58 PM	SiCl4 post valve closed
7/25/2011	12:35:58 PM	Bypass valve closed
7/25/2011	12:35:58 PM	Bubbler valve closed
7/25/2011	12:35:58 PM	Main Vac valve opened
7/25/2011	12:35:58 PM	Helium MFC set to  0.000000
7/25/2011	12:35:58 PM	H2 MFC set to  0.000000
7/25/2011	12:35:58 PM	BCl3 MFC set to  0.000000
7/25/2011	12:35:58 PM	PHl3 MFC set to  0.000000
7/25/2011	12:35:58 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:35:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:35:58 PM	Tube furnace set to 0
7/25/2011	12:36:28 PM	H2 valve closed
7/25/2011	12:36:29 PM	BCl3 valve closed
7/25/2011	12:36:29 PM	PH3 valve closed
7/25/2011	12:36:29 PM	SiCl4 pre valve closed
7/25/2011	12:36:29 PM	SiCl4 post valve closed
7/25/2011	12:36:29 PM	Bypass valve closed
7/25/2011	12:36:29 PM	Bubbler valve closed
7/25/2011	12:36:29 PM	Helium valve opened
7/25/2011	12:36:29 PM	Main Vac valve opened
7/25/2011	12:36:29 PM	Helium MFC set to  20.000000
7/25/2011	12:36:29 PM	H2 MFC set to  0.000000
7/25/2011	12:36:29 PM	BCl3 MFC set to  0.000000
7/25/2011	12:36:29 PM	PHl3 MFC set to  0.000000
7/25/2011	12:36:29 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:36:29 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:36:29 PM	Tube furnace set to 0
7/25/2011	12:36:59 PM	Helium valve closed
7/25/2011	12:36:59 PM	H2 valve closed
7/25/2011	12:36:59 PM	BCl3 valve closed
7/25/2011	12:36:59 PM	PH3 valve closed
7/25/2011	12:36:59 PM	SiCl4 pre valve closed
7/25/2011	12:36:59 PM	SiCl4 post valve closed
7/25/2011	12:36:59 PM	Bypass valve closed
7/25/2011	12:36:59 PM	Bubbler valve closed
7/25/2011	12:36:59 PM	Main Vac valve opened
7/25/2011	12:36:59 PM	Helium MFC set to  0.000000
7/25/2011	12:36:59 PM	H2 MFC set to  0.000000
7/25/2011	12:36:59 PM	BCl3 MFC set to  0.000000
7/25/2011	12:36:59 PM	PHl3 MFC set to  0.000000
7/25/2011	12:36:59 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:36:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:36:59 PM	Tube furnace set to 0
7/25/2011	12:37:29 PM	H2 valve closed
7/25/2011	12:37:29 PM	BCl3 valve closed
7/25/2011	12:37:29 PM	PH3 valve closed
7/25/2011	12:37:29 PM	SiCl4 pre valve closed
7/25/2011	12:37:29 PM	SiCl4 post valve closed
7/25/2011	12:37:29 PM	Bypass valve closed
7/25/2011	12:37:29 PM	Bubbler valve closed
7/25/2011	12:37:29 PM	Helium valve opened
7/25/2011	12:37:29 PM	Main Vac valve opened
7/25/2011	12:37:29 PM	Helium MFC set to  20.000000
7/25/2011	12:37:29 PM	H2 MFC set to  0.000000
7/25/2011	12:37:29 PM	BCl3 MFC set to  0.000000
7/25/2011	12:37:29 PM	PHl3 MFC set to  0.000000
7/25/2011	12:37:29 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:37:29 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:37:29 PM	Tube furnace set to 0
7/25/2011	12:37:59 PM	Helium valve closed
7/25/2011	12:37:59 PM	H2 valve closed
7/25/2011	12:37:59 PM	BCl3 valve closed
7/25/2011	12:37:59 PM	PH3 valve closed
7/25/2011	12:37:59 PM	SiCl4 pre valve closed
7/25/2011	12:37:59 PM	SiCl4 post valve closed
7/25/2011	12:37:59 PM	Bypass valve closed
7/25/2011	12:37:59 PM	Bubbler valve closed
7/25/2011	12:37:59 PM	Main Vac valve opened
7/25/2011	12:37:59 PM	Helium MFC set to  0.000000
7/25/2011	12:37:59 PM	H2 MFC set to  0.000000
7/25/2011	12:37:59 PM	BCl3 MFC set to  0.000000
7/25/2011	12:37:59 PM	PHl3 MFC set to  0.000000
7/25/2011	12:37:59 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:37:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:37:59 PM	Tube furnace set to 0
7/25/2011	12:38:29 PM	H2 valve closed
7/25/2011	12:38:29 PM	BCl3 valve closed
7/25/2011	12:38:29 PM	PH3 valve closed
7/25/2011	12:38:29 PM	SiCl4 pre valve closed
7/25/2011	12:38:29 PM	SiCl4 post valve closed
7/25/2011	12:38:29 PM	Bypass valve closed
7/25/2011	12:38:29 PM	Bubbler valve closed
7/25/2011	12:38:29 PM	Helium valve opened
7/25/2011	12:38:29 PM	Main Vac valve opened
7/25/2011	12:38:29 PM	Helium MFC set to  20.000000
7/25/2011	12:38:29 PM	H2 MFC set to  0.000000
7/25/2011	12:38:29 PM	BCl3 MFC set to  0.000000
7/25/2011	12:38:29 PM	PHl3 MFC set to  0.000000
7/25/2011	12:38:29 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:38:29 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:38:29 PM	Tube furnace set to 0
7/25/2011	12:39:00 PM	Helium valve closed
7/25/2011	12:39:00 PM	H2 valve closed
7/25/2011	12:39:00 PM	BCl3 valve closed
7/25/2011	12:39:00 PM	PH3 valve closed
7/25/2011	12:39:00 PM	SiCl4 pre valve closed
7/25/2011	12:39:00 PM	SiCl4 post valve closed
7/25/2011	12:39:00 PM	Bypass valve closed
7/25/2011	12:39:00 PM	Bubbler valve closed
7/25/2011	12:39:00 PM	Main Vac valve opened
7/25/2011	12:39:00 PM	Helium MFC set to  0.000000
7/25/2011	12:39:00 PM	H2 MFC set to  0.000000
7/25/2011	12:39:00 PM	BCl3 MFC set to  0.000000
7/25/2011	12:39:00 PM	PHl3 MFC set to  0.000000
7/25/2011	12:39:00 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:39:00 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:39:00 PM	Tube furnace set to 0
7/25/2011	12:39:30 PM	H2 valve closed
7/25/2011	12:39:30 PM	BCl3 valve closed
7/25/2011	12:39:30 PM	PH3 valve closed
7/25/2011	12:39:30 PM	SiCl4 pre valve closed
7/25/2011	12:39:30 PM	SiCl4 post valve closed
7/25/2011	12:39:30 PM	Bypass valve closed
7/25/2011	12:39:30 PM	Bubbler valve closed
7/25/2011	12:39:30 PM	Helium valve opened
7/25/2011	12:39:30 PM	Main Vac valve opened
7/25/2011	12:39:30 PM	Helium MFC set to  20.000000
7/25/2011	12:39:30 PM	H2 MFC set to  0.000000
7/25/2011	12:39:30 PM	BCl3 MFC set to  0.000000
7/25/2011	12:39:30 PM	PHl3 MFC set to  0.000000
7/25/2011	12:39:30 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:39:30 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:39:30 PM	Tube furnace set to 0
7/25/2011	12:40:00 PM	Helium valve closed
7/25/2011	12:40:00 PM	H2 valve closed
7/25/2011	12:40:00 PM	BCl3 valve closed
7/25/2011	12:40:00 PM	PH3 valve closed
7/25/2011	12:40:00 PM	SiCl4 pre valve closed
7/25/2011	12:40:00 PM	SiCl4 post valve closed
7/25/2011	12:40:00 PM	Bypass valve closed
7/25/2011	12:40:00 PM	Bubbler valve closed
7/25/2011	12:40:00 PM	Main Vac valve opened
7/25/2011	12:40:00 PM	Helium MFC set to  0.000000
7/25/2011	12:40:00 PM	H2 MFC set to  0.000000
7/25/2011	12:40:00 PM	BCl3 MFC set to  0.000000
7/25/2011	12:40:00 PM	PHl3 MFC set to  0.000000
7/25/2011	12:40:00 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:40:00 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:40:00 PM	Tube furnace set to 0
7/25/2011	12:40:30 PM	H2 valve closed
7/25/2011	12:40:30 PM	BCl3 valve closed
7/25/2011	12:40:30 PM	PH3 valve closed
7/25/2011	12:40:30 PM	SiCl4 pre valve closed
7/25/2011	12:40:30 PM	SiCl4 post valve closed
7/25/2011	12:40:30 PM	Bypass valve closed
7/25/2011	12:40:30 PM	Bubbler valve closed
7/25/2011	12:40:30 PM	Helium valve opened
7/25/2011	12:40:30 PM	Main Vac valve opened
7/25/2011	12:40:30 PM	Helium MFC set to  20.000000
7/25/2011	12:40:30 PM	H2 MFC set to  0.000000
7/25/2011	12:40:30 PM	BCl3 MFC set to  0.000000
7/25/2011	12:40:30 PM	PHl3 MFC set to  0.000000
7/25/2011	12:40:30 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:40:30 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:40:30 PM	Tube furnace set to 0
7/25/2011	12:41:00 PM	Helium valve closed
7/25/2011	12:41:00 PM	H2 valve closed
7/25/2011	12:41:00 PM	BCl3 valve closed
7/25/2011	12:41:00 PM	PH3 valve closed
7/25/2011	12:41:00 PM	SiCl4 pre valve closed
7/25/2011	12:41:00 PM	SiCl4 post valve closed
7/25/2011	12:41:00 PM	Bypass valve closed
7/25/2011	12:41:00 PM	Bubbler valve closed
7/25/2011	12:41:00 PM	Main Vac valve opened
7/25/2011	12:41:00 PM	Helium MFC set to  0.000000
7/25/2011	12:41:00 PM	H2 MFC set to  0.000000
7/25/2011	12:41:00 PM	BCl3 MFC set to  0.000000
7/25/2011	12:41:00 PM	PHl3 MFC set to  0.000000
7/25/2011	12:41:00 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:41:00 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:41:01 PM	Tube furnace set to 0
7/25/2011	12:41:31 PM	H2 valve closed
7/25/2011	12:41:31 PM	BCl3 valve closed
7/25/2011	12:41:31 PM	PH3 valve closed
7/25/2011	12:41:31 PM	SiCl4 pre valve closed
7/25/2011	12:41:31 PM	SiCl4 post valve closed
7/25/2011	12:41:31 PM	Bypass valve closed
7/25/2011	12:41:31 PM	Bubbler valve closed
7/25/2011	12:41:31 PM	Helium valve opened
7/25/2011	12:41:31 PM	Main Vac valve opened
7/25/2011	12:41:31 PM	Helium MFC set to  20.000000
7/25/2011	12:41:31 PM	H2 MFC set to  0.000000
7/25/2011	12:41:31 PM	BCl3 MFC set to  0.000000
7/25/2011	12:41:31 PM	PHl3 MFC set to  0.000000
7/25/2011	12:41:31 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:41:31 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:41:31 PM	Tube furnace set to 0
7/25/2011	12:42:01 PM	Helium valve closed
7/25/2011	12:42:01 PM	H2 valve closed
7/25/2011	12:42:01 PM	BCl3 valve closed
7/25/2011	12:42:01 PM	PH3 valve closed
7/25/2011	12:42:01 PM	SiCl4 pre valve closed
7/25/2011	12:42:01 PM	SiCl4 post valve closed
7/25/2011	12:42:01 PM	Bypass valve closed
7/25/2011	12:42:01 PM	Bubbler valve closed
7/25/2011	12:42:01 PM	Main Vac valve opened
7/25/2011	12:42:01 PM	Helium MFC set to  0.000000
7/25/2011	12:42:01 PM	H2 MFC set to  0.000000
7/25/2011	12:42:01 PM	BCl3 MFC set to  0.000000
7/25/2011	12:42:01 PM	PHl3 MFC set to  0.000000
7/25/2011	12:42:01 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:42:01 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:42:01 PM	Tube furnace set to 0
7/25/2011	12:42:31 PM	H2 valve closed
7/25/2011	12:42:31 PM	BCl3 valve closed
7/25/2011	12:42:31 PM	PH3 valve closed
7/25/2011	12:42:31 PM	SiCl4 pre valve closed
7/25/2011	12:42:31 PM	SiCl4 post valve closed
7/25/2011	12:42:31 PM	Bypass valve closed
7/25/2011	12:42:31 PM	Bubbler valve closed
7/25/2011	12:42:31 PM	Helium valve opened
7/25/2011	12:42:31 PM	Main Vac valve opened
7/25/2011	12:42:31 PM	Helium MFC set to  20.000000
7/25/2011	12:42:31 PM	H2 MFC set to  0.000000
7/25/2011	12:42:31 PM	BCl3 MFC set to  0.000000
7/25/2011	12:42:31 PM	PHl3 MFC set to  0.000000
7/25/2011	12:42:31 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:42:31 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:42:31 PM	Tube furnace set to 0
7/25/2011	12:43:01 PM	Helium valve closed
7/25/2011	12:43:01 PM	H2 valve closed
7/25/2011	12:43:01 PM	BCl3 valve closed
7/25/2011	12:43:01 PM	PH3 valve closed
7/25/2011	12:43:01 PM	SiCl4 pre valve closed
7/25/2011	12:43:01 PM	SiCl4 post valve closed
7/25/2011	12:43:01 PM	Bypass valve closed
7/25/2011	12:43:01 PM	Bubbler valve closed
7/25/2011	12:43:01 PM	Main Vac valve opened
7/25/2011	12:43:01 PM	Helium MFC set to  0.000000
7/25/2011	12:43:01 PM	H2 MFC set to  0.000000
7/25/2011	12:43:01 PM	BCl3 MFC set to  0.000000
7/25/2011	12:43:01 PM	PHl3 MFC set to  0.000000
7/25/2011	12:43:01 PM	SiCl4 MFC set to  0.000000
7/25/2011	12:43:01 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	12:43:01 PM	Tube furnace set to 0
7/25/2011	12:43:02 PM	Run finished at 12:43 PM
7/25/2011	1:02:31 PM	Main Vac valve closed
7/25/2011	1:02:46 PM	Main Vac valve opened
7/25/2011	1:03:43 PM	Recipe started at 1:03 PM
7/25/2011	1:03:43 PM	Helium valve closed
7/25/2011	1:03:43 PM	H2 valve closed
7/25/2011	1:03:43 PM	BCl3 valve closed
7/25/2011	1:03:43 PM	PH3 valve closed
7/25/2011	1:03:43 PM	SiCl4 pre valve closed
7/25/2011	1:03:43 PM	SiCl4 post valve closed
7/25/2011	1:03:43 PM	Main Vac valve closed
7/25/2011	1:03:43 PM	Bypass valve closed
7/25/2011	1:03:43 PM	Bubbler valve closed
7/25/2011	1:03:43 PM	Helium MFC set to  0.000000
7/25/2011	1:03:43 PM	H2 MFC set to  0.000000
7/25/2011	1:03:43 PM	BCl3 MFC set to  0.000000
7/25/2011	1:03:43 PM	PHl3 MFC set to  0.000000
7/25/2011	1:03:43 PM	SiCl4 MFC set to  0.000000
7/25/2011	1:03:43 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	1:03:44 PM	Tube furnace set to 0
7/25/2011	1:03:47 PM	Helium valve closed
7/25/2011	1:03:47 PM	BCl3 valve closed
7/25/2011	1:03:47 PM	PH3 valve closed
7/25/2011	1:03:47 PM	SiCl4 pre valve closed
7/25/2011	1:03:47 PM	SiCl4 post valve closed
7/25/2011	1:03:47 PM	Main Vac valve closed
7/25/2011	1:03:47 PM	Bypass valve closed
7/25/2011	1:03:47 PM	Bubbler valve closed
7/25/2011	1:03:47 PM	H2 valve opened
7/25/2011	1:03:47 PM	Helium MFC set to  0.000000
7/25/2011	1:03:47 PM	H2 MFC set to  500.000000
7/25/2011	1:03:47 PM	BCl3 MFC set to  0.000000
7/25/2011	1:03:47 PM	PHl3 MFC set to  0.000000
7/25/2011	1:03:47 PM	SiCl4 MFC set to  0.000000
7/25/2011	1:03:47 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	1:03:47 PM	Tube furnace set to 0
7/25/2011	1:04:51 PM	Helium valve closed
7/25/2011	1:04:51 PM	BCl3 valve closed
7/25/2011	1:04:51 PM	PH3 valve closed
7/25/2011	1:04:51 PM	SiCl4 pre valve closed
7/25/2011	1:04:51 PM	SiCl4 post valve closed
7/25/2011	1:04:51 PM	Main Vac valve closed
7/25/2011	1:04:51 PM	Bypass valve closed
7/25/2011	1:04:51 PM	H2 valve opened
7/25/2011	1:04:51 PM	Bubbler valve opened
7/25/2011	1:04:51 PM	Helium MFC set to  0.000000
7/25/2011	1:04:51 PM	H2 MFC set to  500.000000
7/25/2011	1:04:51 PM	BCl3 MFC set to  0.000000
7/25/2011	1:04:51 PM	PHl3 MFC set to  0.000000
7/25/2011	1:04:51 PM	SiCl4 MFC set to  0.000000
7/25/2011	1:04:51 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	1:04:52 PM	Tube furnace set to 0
7/25/2011	1:04:53 PM	Helium valve closed
7/25/2011	1:04:53 PM	BCl3 valve closed
7/25/2011	1:04:53 PM	PH3 valve closed
7/25/2011	1:04:53 PM	SiCl4 pre valve closed
7/25/2011	1:04:53 PM	SiCl4 post valve closed
7/25/2011	1:04:53 PM	Main Vac valve closed
7/25/2011	1:04:53 PM	Bypass valve closed
7/25/2011	1:04:53 PM	H2 valve opened
7/25/2011	1:04:53 PM	Bubbler valve opened
7/25/2011	1:04:53 PM	Helium MFC set to  0.000000
7/25/2011	1:04:53 PM	H2 MFC set to  500.000000
7/25/2011	1:04:53 PM	BCl3 MFC set to  0.000000
7/25/2011	1:04:53 PM	PHl3 MFC set to  0.000000
7/25/2011	1:04:53 PM	SiCl4 MFC set to  0.000000
7/25/2011	1:04:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	1:04:53 PM	Tube furnace set to 1000
7/25/2011	1:24:53 PM	Helium valve closed
7/25/2011	1:24:53 PM	PH3 valve closed
7/25/2011	1:24:53 PM	Main Vac valve closed
7/25/2011	1:24:53 PM	Bypass valve closed
7/25/2011	1:24:53 PM	H2 valve opened
7/25/2011	1:24:53 PM	BCl3 valve opened
7/25/2011	1:24:53 PM	SiCl4 pre valve opened
7/25/2011	1:24:53 PM	SiCl4 post valve opened
7/25/2011	1:24:53 PM	Bubbler valve opened
7/25/2011	1:24:53 PM	Helium MFC set to  0.000000
7/25/2011	1:24:53 PM	H2 MFC set to  500.000000
7/25/2011	1:24:53 PM	BCl3 MFC set to  3.000000
7/25/2011	1:24:53 PM	PHl3 MFC set to  0.000000
7/25/2011	1:24:53 PM	SiCl4 MFC set to  50.000000
7/25/2011	1:24:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	1:24:53 PM	Tube furnace set to 1000
7/25/2011	1:40:53 PM	Helium valve closed
7/25/2011	1:40:53 PM	BCl3 valve closed
7/25/2011	1:40:53 PM	PH3 valve closed
7/25/2011	1:40:53 PM	SiCl4 pre valve closed
7/25/2011	1:40:53 PM	SiCl4 post valve closed
7/25/2011	1:40:53 PM	Main Vac valve closed
7/25/2011	1:40:53 PM	Bypass valve closed
7/25/2011	1:40:53 PM	H2 valve opened
7/25/2011	1:40:53 PM	Bubbler valve opened
7/25/2011	1:40:53 PM	Helium MFC set to  0.000000
7/25/2011	1:40:53 PM	H2 MFC set to  500.000000
7/25/2011	1:40:53 PM	BCl3 MFC set to  0.000000
7/25/2011	1:40:53 PM	PHl3 MFC set to  0.000000
7/25/2011	1:40:53 PM	SiCl4 MFC set to  0.000000
7/25/2011	1:40:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	1:40:53 PM	Tube furnace set to 750
7/25/2011	1:45:53 PM	H2 valve closed
7/25/2011	1:45:53 PM	BCl3 valve closed
7/25/2011	1:45:53 PM	PH3 valve closed
7/25/2011	1:45:53 PM	SiCl4 pre valve closed
7/25/2011	1:45:53 PM	SiCl4 post valve closed
7/25/2011	1:45:53 PM	Main Vac valve closed
7/25/2011	1:45:53 PM	Bypass valve closed
7/25/2011	1:45:53 PM	Helium valve opened
7/25/2011	1:45:53 PM	Bubbler valve opened
7/25/2011	1:45:53 PM	Helium MFC set to  500.000000
7/25/2011	1:45:53 PM	H2 MFC set to  0.000000
7/25/2011	1:45:53 PM	BCl3 MFC set to  0.000000
7/25/2011	1:45:53 PM	PHl3 MFC set to  0.000000
7/25/2011	1:45:53 PM	SiCl4 MFC set to  0.000000
7/25/2011	1:45:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	1:45:53 PM	Tube furnace set to 0
7/25/2011	2:05:53 PM	Helium valve closed
7/25/2011	2:05:53 PM	H2 valve closed
7/25/2011	2:05:53 PM	BCl3 valve closed
7/25/2011	2:05:53 PM	PH3 valve closed
7/25/2011	2:05:53 PM	SiCl4 pre valve closed
7/25/2011	2:05:53 PM	SiCl4 post valve closed
7/25/2011	2:05:53 PM	Main Vac valve closed
7/25/2011	2:05:53 PM	Bypass valve closed
7/25/2011	2:05:53 PM	Bubbler valve closed
7/25/2011	2:05:53 PM	Helium MFC set to  0.000000
7/25/2011	2:05:53 PM	H2 MFC set to  0.000000
7/25/2011	2:05:53 PM	BCl3 MFC set to  0.000000
7/25/2011	2:05:53 PM	PHl3 MFC set to  0.000000
7/25/2011	2:05:53 PM	SiCl4 MFC set to  0.000000
7/25/2011	2:05:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	2:05:54 PM	Tube furnace set to 0
7/25/2011	2:05:55 PM	Run finished at 2:05 PM
7/25/2011	2:30:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	2:30:44 PM	Recipe started at 2:30 PM
7/25/2011	2:30:44 PM	Helium valve closed
7/25/2011	2:30:44 PM	H2 valve closed
7/25/2011	2:30:44 PM	BCl3 valve closed
7/25/2011	2:30:44 PM	PH3 valve closed
7/25/2011	2:30:44 PM	SiCl4 pre valve closed
7/25/2011	2:30:44 PM	SiCl4 post valve closed
7/25/2011	2:30:44 PM	Main Vac valve closed
7/25/2011	2:30:44 PM	Bypass valve closed
7/25/2011	2:30:44 PM	Bubbler valve closed
7/25/2011	2:30:44 PM	Helium MFC set to  0.000000
7/25/2011	2:30:44 PM	H2 MFC set to  0.000000
7/25/2011	2:30:44 PM	BCl3 MFC set to  0.000000
7/25/2011	2:30:44 PM	PHl3 MFC set to  0.000000
7/25/2011	2:30:44 PM	SiCl4 MFC set to  0.000000
7/25/2011	2:30:44 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	2:30:44 PM	Tube furnace set to 0
7/25/2011	2:30:47 PM	H2 valve closed
7/25/2011	2:30:47 PM	BCl3 valve closed
7/25/2011	2:30:47 PM	PH3 valve closed
7/25/2011	2:30:47 PM	SiCl4 pre valve closed
7/25/2011	2:30:47 PM	SiCl4 post valve closed
7/25/2011	2:30:47 PM	Main Vac valve closed
7/25/2011	2:30:47 PM	Bypass valve closed
7/25/2011	2:30:47 PM	Bubbler valve closed
7/25/2011	2:30:47 PM	Helium valve opened
7/25/2011	2:30:47 PM	Helium MFC set to  500.000000
7/25/2011	2:30:47 PM	H2 MFC set to  0.000000
7/25/2011	2:30:47 PM	BCl3 MFC set to  0.000000
7/25/2011	2:30:47 PM	PHl3 MFC set to  0.000000
7/25/2011	2:30:47 PM	SiCl4 MFC set to  0.000000
7/25/2011	2:30:47 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	2:30:48 PM	Tube furnace set to 0
7/25/2011	2:30:54 PM	Helium valve closed
7/25/2011	2:30:54 PM	H2 valve closed
7/25/2011	2:30:54 PM	BCl3 valve closed
7/25/2011	2:30:54 PM	PH3 valve closed
7/25/2011	2:30:54 PM	SiCl4 pre valve closed
7/25/2011	2:30:54 PM	SiCl4 post valve closed
7/25/2011	2:30:54 PM	Main Vac valve closed
7/25/2011	2:30:54 PM	Bypass valve closed
7/25/2011	2:30:54 PM	Bubbler valve closed
7/25/2011	2:30:54 PM	Helium MFC set to  0.000000
7/25/2011	2:30:54 PM	H2 MFC set to  0.000000
7/25/2011	2:30:54 PM	BCl3 MFC set to  0.000000
7/25/2011	2:30:54 PM	PHl3 MFC set to  0.000000
7/25/2011	2:30:54 PM	SiCl4 MFC set to  0.000000
7/25/2011	2:30:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	2:30:54 PM	Tube furnace set to 0
7/25/2011	2:30:55 PM	Run finished at 2:30 PM
7/25/2011	2:30:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	2:35:08 PM	Recipe started at 2:35 PM
7/25/2011	2:35:08 PM	Helium valve closed
7/25/2011	2:35:08 PM	H2 valve closed
7/25/2011	2:35:08 PM	BCl3 valve closed
7/25/2011	2:35:08 PM	PH3 valve closed
7/25/2011	2:35:08 PM	SiCl4 pre valve closed
7/25/2011	2:35:08 PM	SiCl4 post valve closed
7/25/2011	2:35:08 PM	Main Vac valve closed
7/25/2011	2:35:08 PM	Bubbler valve closed
7/25/2011	2:35:08 PM	Bypass valve opened
7/25/2011	2:35:08 PM	Helium MFC set to  0.000000
7/25/2011	2:35:08 PM	H2 MFC set to  0.000000
7/25/2011	2:35:08 PM	BCl3 MFC set to  0.000000
7/25/2011	2:35:08 PM	PHl3 MFC set to  0.000000
7/25/2011	2:35:08 PM	SiCl4 MFC set to  0.000000
7/25/2011	2:35:08 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	2:35:08 PM	Tube furnace set to 0
7/25/2011	2:36:10 PM	Helium valve closed
7/25/2011	2:36:10 PM	H2 valve closed
7/25/2011	2:36:10 PM	BCl3 valve closed
7/25/2011	2:36:10 PM	PH3 valve closed
7/25/2011	2:36:10 PM	SiCl4 pre valve closed
7/25/2011	2:36:10 PM	SiCl4 post valve closed
7/25/2011	2:36:10 PM	Main Vac valve closed
7/25/2011	2:36:10 PM	Bubbler valve closed
7/25/2011	2:36:10 PM	Bypass valve opened
7/25/2011	2:36:10 PM	Helium MFC set to  0.000000
7/25/2011	2:36:10 PM	H2 MFC set to  0.000000
7/25/2011	2:36:10 PM	BCl3 MFC set to  0.000000
7/25/2011	2:36:10 PM	PHl3 MFC set to  0.000000
7/25/2011	2:36:10 PM	SiCl4 MFC set to  0.000000
7/25/2011	2:36:10 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	2:36:10 PM	Tube furnace set to 0
7/25/2011	2:36:40 PM	Helium valve closed
7/25/2011	2:36:40 PM	H2 valve closed
7/25/2011	2:36:40 PM	BCl3 valve closed
7/25/2011	2:36:40 PM	PH3 valve closed
7/25/2011	2:36:40 PM	SiCl4 pre valve closed
7/25/2011	2:36:40 PM	SiCl4 post valve closed
7/25/2011	2:36:40 PM	Bypass valve closed
7/25/2011	2:36:40 PM	Bubbler valve closed
7/25/2011	2:36:40 PM	Main Vac valve opened
7/25/2011	2:36:40 PM	Helium MFC set to  0.000000
7/25/2011	2:36:40 PM	H2 MFC set to  0.000000
7/25/2011	2:36:40 PM	BCl3 MFC set to  0.000000
7/25/2011	2:36:40 PM	PHl3 MFC set to  0.000000
7/25/2011	2:36:40 PM	SiCl4 MFC set to  0.000000
7/25/2011	2:36:40 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	2:36:40 PM	Tube furnace set to 0
7/25/2011	3:06:40 PM	H2 valve closed
7/25/2011	3:06:40 PM	BCl3 valve closed
7/25/2011	3:06:40 PM	PH3 valve closed
7/25/2011	3:06:40 PM	SiCl4 pre valve closed
7/25/2011	3:06:40 PM	SiCl4 post valve closed
7/25/2011	3:06:40 PM	Bypass valve closed
7/25/2011	3:06:40 PM	Bubbler valve closed
7/25/2011	3:06:40 PM	Helium valve opened
7/25/2011	3:06:40 PM	Main Vac valve opened
7/25/2011	3:06:40 PM	Helium MFC set to  20.000000
7/25/2011	3:06:40 PM	H2 MFC set to  0.000000
7/25/2011	3:06:40 PM	BCl3 MFC set to  0.000000
7/25/2011	3:06:40 PM	PHl3 MFC set to  0.000000
7/25/2011	3:06:40 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:06:40 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:06:41 PM	Tube furnace set to 0
7/25/2011	3:07:11 PM	Helium valve closed
7/25/2011	3:07:11 PM	H2 valve closed
7/25/2011	3:07:11 PM	BCl3 valve closed
7/25/2011	3:07:11 PM	PH3 valve closed
7/25/2011	3:07:11 PM	SiCl4 pre valve closed
7/25/2011	3:07:11 PM	SiCl4 post valve closed
7/25/2011	3:07:11 PM	Bypass valve closed
7/25/2011	3:07:11 PM	Bubbler valve closed
7/25/2011	3:07:11 PM	Main Vac valve opened
7/25/2011	3:07:11 PM	Helium MFC set to  0.000000
7/25/2011	3:07:11 PM	H2 MFC set to  0.000000
7/25/2011	3:07:11 PM	BCl3 MFC set to  0.000000
7/25/2011	3:07:11 PM	PHl3 MFC set to  0.000000
7/25/2011	3:07:11 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:07:11 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:07:11 PM	Tube furnace set to 0
7/25/2011	3:07:41 PM	H2 valve closed
7/25/2011	3:07:41 PM	BCl3 valve closed
7/25/2011	3:07:41 PM	PH3 valve closed
7/25/2011	3:07:41 PM	SiCl4 pre valve closed
7/25/2011	3:07:41 PM	SiCl4 post valve closed
7/25/2011	3:07:41 PM	Bypass valve closed
7/25/2011	3:07:41 PM	Bubbler valve closed
7/25/2011	3:07:41 PM	Helium valve opened
7/25/2011	3:07:41 PM	Main Vac valve opened
7/25/2011	3:07:41 PM	Helium MFC set to  20.000000
7/25/2011	3:07:41 PM	H2 MFC set to  0.000000
7/25/2011	3:07:41 PM	BCl3 MFC set to  0.000000
7/25/2011	3:07:41 PM	PHl3 MFC set to  0.000000
7/25/2011	3:07:41 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:07:41 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:07:41 PM	Tube furnace set to 0
7/25/2011	3:08:11 PM	Helium valve closed
7/25/2011	3:08:11 PM	H2 valve closed
7/25/2011	3:08:11 PM	BCl3 valve closed
7/25/2011	3:08:11 PM	PH3 valve closed
7/25/2011	3:08:11 PM	SiCl4 pre valve closed
7/25/2011	3:08:11 PM	SiCl4 post valve closed
7/25/2011	3:08:11 PM	Bypass valve closed
7/25/2011	3:08:11 PM	Bubbler valve closed
7/25/2011	3:08:11 PM	Main Vac valve opened
7/25/2011	3:08:11 PM	Helium MFC set to  0.000000
7/25/2011	3:08:11 PM	H2 MFC set to  0.000000
7/25/2011	3:08:11 PM	BCl3 MFC set to  0.000000
7/25/2011	3:08:11 PM	PHl3 MFC set to  0.000000
7/25/2011	3:08:11 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:08:11 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:08:11 PM	Tube furnace set to 0
7/25/2011	3:08:41 PM	H2 valve closed
7/25/2011	3:08:41 PM	BCl3 valve closed
7/25/2011	3:08:41 PM	PH3 valve closed
7/25/2011	3:08:41 PM	SiCl4 pre valve closed
7/25/2011	3:08:41 PM	SiCl4 post valve closed
7/25/2011	3:08:41 PM	Bypass valve closed
7/25/2011	3:08:41 PM	Bubbler valve closed
7/25/2011	3:08:41 PM	Helium valve opened
7/25/2011	3:08:41 PM	Main Vac valve opened
7/25/2011	3:08:41 PM	Helium MFC set to  20.000000
7/25/2011	3:08:41 PM	H2 MFC set to  0.000000
7/25/2011	3:08:41 PM	BCl3 MFC set to  0.000000
7/25/2011	3:08:41 PM	PHl3 MFC set to  0.000000
7/25/2011	3:08:41 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:08:41 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:08:41 PM	Tube furnace set to 0
7/25/2011	3:09:11 PM	Helium valve closed
7/25/2011	3:09:11 PM	H2 valve closed
7/25/2011	3:09:11 PM	BCl3 valve closed
7/25/2011	3:09:11 PM	PH3 valve closed
7/25/2011	3:09:11 PM	SiCl4 pre valve closed
7/25/2011	3:09:11 PM	SiCl4 post valve closed
7/25/2011	3:09:11 PM	Bypass valve closed
7/25/2011	3:09:11 PM	Bubbler valve closed
7/25/2011	3:09:11 PM	Main Vac valve opened
7/25/2011	3:09:11 PM	Helium MFC set to  0.000000
7/25/2011	3:09:11 PM	H2 MFC set to  0.000000
7/25/2011	3:09:11 PM	BCl3 MFC set to  0.000000
7/25/2011	3:09:11 PM	PHl3 MFC set to  0.000000
7/25/2011	3:09:11 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:09:11 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:09:12 PM	Tube furnace set to 0
7/25/2011	3:09:42 PM	H2 valve closed
7/25/2011	3:09:42 PM	BCl3 valve closed
7/25/2011	3:09:42 PM	PH3 valve closed
7/25/2011	3:09:42 PM	SiCl4 pre valve closed
7/25/2011	3:09:42 PM	SiCl4 post valve closed
7/25/2011	3:09:42 PM	Bypass valve closed
7/25/2011	3:09:42 PM	Bubbler valve closed
7/25/2011	3:09:42 PM	Helium valve opened
7/25/2011	3:09:42 PM	Main Vac valve opened
7/25/2011	3:09:42 PM	Helium MFC set to  20.000000
7/25/2011	3:09:42 PM	H2 MFC set to  0.000000
7/25/2011	3:09:42 PM	BCl3 MFC set to  0.000000
7/25/2011	3:09:42 PM	PHl3 MFC set to  0.000000
7/25/2011	3:09:42 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:09:42 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:09:42 PM	Tube furnace set to 0
7/25/2011	3:10:12 PM	Helium valve closed
7/25/2011	3:10:12 PM	H2 valve closed
7/25/2011	3:10:12 PM	BCl3 valve closed
7/25/2011	3:10:12 PM	PH3 valve closed
7/25/2011	3:10:12 PM	SiCl4 pre valve closed
7/25/2011	3:10:12 PM	SiCl4 post valve closed
7/25/2011	3:10:12 PM	Bypass valve closed
7/25/2011	3:10:12 PM	Bubbler valve closed
7/25/2011	3:10:12 PM	Main Vac valve opened
7/25/2011	3:10:12 PM	Helium MFC set to  0.000000
7/25/2011	3:10:12 PM	H2 MFC set to  0.000000
7/25/2011	3:10:12 PM	BCl3 MFC set to  0.000000
7/25/2011	3:10:12 PM	PHl3 MFC set to  0.000000
7/25/2011	3:10:12 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:10:12 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:10:12 PM	Tube furnace set to 0
7/25/2011	3:10:42 PM	H2 valve closed
7/25/2011	3:10:42 PM	BCl3 valve closed
7/25/2011	3:10:42 PM	PH3 valve closed
7/25/2011	3:10:42 PM	SiCl4 pre valve closed
7/25/2011	3:10:42 PM	SiCl4 post valve closed
7/25/2011	3:10:42 PM	Bypass valve closed
7/25/2011	3:10:42 PM	Bubbler valve closed
7/25/2011	3:10:42 PM	Helium valve opened
7/25/2011	3:10:42 PM	Main Vac valve opened
7/25/2011	3:10:42 PM	Helium MFC set to  20.000000
7/25/2011	3:10:42 PM	H2 MFC set to  0.000000
7/25/2011	3:10:42 PM	BCl3 MFC set to  0.000000
7/25/2011	3:10:42 PM	PHl3 MFC set to  0.000000
7/25/2011	3:10:42 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:10:42 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:10:42 PM	Tube furnace set to 0
7/25/2011	3:11:12 PM	Helium valve closed
7/25/2011	3:11:12 PM	H2 valve closed
7/25/2011	3:11:12 PM	BCl3 valve closed
7/25/2011	3:11:12 PM	PH3 valve closed
7/25/2011	3:11:12 PM	SiCl4 pre valve closed
7/25/2011	3:11:12 PM	SiCl4 post valve closed
7/25/2011	3:11:12 PM	Bypass valve closed
7/25/2011	3:11:12 PM	Bubbler valve closed
7/25/2011	3:11:12 PM	Main Vac valve opened
7/25/2011	3:11:12 PM	Helium MFC set to  0.000000
7/25/2011	3:11:12 PM	H2 MFC set to  0.000000
7/25/2011	3:11:12 PM	BCl3 MFC set to  0.000000
7/25/2011	3:11:12 PM	PHl3 MFC set to  0.000000
7/25/2011	3:11:12 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:11:12 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:11:12 PM	Tube furnace set to 0
7/25/2011	3:11:42 PM	H2 valve closed
7/25/2011	3:11:42 PM	BCl3 valve closed
7/25/2011	3:11:42 PM	PH3 valve closed
7/25/2011	3:11:42 PM	SiCl4 pre valve closed
7/25/2011	3:11:42 PM	SiCl4 post valve closed
7/25/2011	3:11:42 PM	Bypass valve closed
7/25/2011	3:11:42 PM	Bubbler valve closed
7/25/2011	3:11:42 PM	Helium valve opened
7/25/2011	3:11:42 PM	Main Vac valve opened
7/25/2011	3:11:42 PM	Helium MFC set to  20.000000
7/25/2011	3:11:42 PM	H2 MFC set to  0.000000
7/25/2011	3:11:42 PM	BCl3 MFC set to  0.000000
7/25/2011	3:11:42 PM	PHl3 MFC set to  0.000000
7/25/2011	3:11:42 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:11:42 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:11:43 PM	Tube furnace set to 0
7/25/2011	3:12:13 PM	Helium valve closed
7/25/2011	3:12:13 PM	H2 valve closed
7/25/2011	3:12:13 PM	BCl3 valve closed
7/25/2011	3:12:13 PM	PH3 valve closed
7/25/2011	3:12:13 PM	SiCl4 pre valve closed
7/25/2011	3:12:13 PM	SiCl4 post valve closed
7/25/2011	3:12:13 PM	Bypass valve closed
7/25/2011	3:12:13 PM	Bubbler valve closed
7/25/2011	3:12:13 PM	Main Vac valve opened
7/25/2011	3:12:13 PM	Helium MFC set to  0.000000
7/25/2011	3:12:13 PM	H2 MFC set to  0.000000
7/25/2011	3:12:13 PM	BCl3 MFC set to  0.000000
7/25/2011	3:12:13 PM	PHl3 MFC set to  0.000000
7/25/2011	3:12:13 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:12:13 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:12:13 PM	Tube furnace set to 0
7/25/2011	3:12:43 PM	H2 valve closed
7/25/2011	3:12:43 PM	BCl3 valve closed
7/25/2011	3:12:43 PM	PH3 valve closed
7/25/2011	3:12:43 PM	SiCl4 pre valve closed
7/25/2011	3:12:43 PM	SiCl4 post valve closed
7/25/2011	3:12:43 PM	Bypass valve closed
7/25/2011	3:12:43 PM	Bubbler valve closed
7/25/2011	3:12:43 PM	Helium valve opened
7/25/2011	3:12:43 PM	Main Vac valve opened
7/25/2011	3:12:43 PM	Helium MFC set to  20.000000
7/25/2011	3:12:43 PM	H2 MFC set to  0.000000
7/25/2011	3:12:43 PM	BCl3 MFC set to  0.000000
7/25/2011	3:12:43 PM	PHl3 MFC set to  0.000000
7/25/2011	3:12:43 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:12:43 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:12:43 PM	Tube furnace set to 0
7/25/2011	3:13:13 PM	Helium valve closed
7/25/2011	3:13:13 PM	H2 valve closed
7/25/2011	3:13:13 PM	BCl3 valve closed
7/25/2011	3:13:13 PM	PH3 valve closed
7/25/2011	3:13:13 PM	SiCl4 pre valve closed
7/25/2011	3:13:13 PM	SiCl4 post valve closed
7/25/2011	3:13:13 PM	Bypass valve closed
7/25/2011	3:13:13 PM	Bubbler valve closed
7/25/2011	3:13:13 PM	Main Vac valve opened
7/25/2011	3:13:13 PM	Helium MFC set to  0.000000
7/25/2011	3:13:13 PM	H2 MFC set to  0.000000
7/25/2011	3:13:13 PM	BCl3 MFC set to  0.000000
7/25/2011	3:13:13 PM	PHl3 MFC set to  0.000000
7/25/2011	3:13:13 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:13:13 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:13:13 PM	Tube furnace set to 0
7/25/2011	3:13:43 PM	H2 valve closed
7/25/2011	3:13:43 PM	BCl3 valve closed
7/25/2011	3:13:43 PM	PH3 valve closed
7/25/2011	3:13:43 PM	SiCl4 pre valve closed
7/25/2011	3:13:43 PM	SiCl4 post valve closed
7/25/2011	3:13:43 PM	Bypass valve closed
7/25/2011	3:13:43 PM	Bubbler valve closed
7/25/2011	3:13:43 PM	Helium valve opened
7/25/2011	3:13:43 PM	Main Vac valve opened
7/25/2011	3:13:43 PM	Helium MFC set to  20.000000
7/25/2011	3:13:43 PM	H2 MFC set to  0.000000
7/25/2011	3:13:43 PM	BCl3 MFC set to  0.000000
7/25/2011	3:13:43 PM	PHl3 MFC set to  0.000000
7/25/2011	3:13:43 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:13:43 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:13:43 PM	Tube furnace set to 0
7/25/2011	3:14:13 PM	Helium valve closed
7/25/2011	3:14:13 PM	H2 valve closed
7/25/2011	3:14:13 PM	BCl3 valve closed
7/25/2011	3:14:13 PM	PH3 valve closed
7/25/2011	3:14:13 PM	SiCl4 pre valve closed
7/25/2011	3:14:13 PM	SiCl4 post valve closed
7/25/2011	3:14:13 PM	Bypass valve closed
7/25/2011	3:14:13 PM	Bubbler valve closed
7/25/2011	3:14:13 PM	Main Vac valve opened
7/25/2011	3:14:13 PM	Helium MFC set to  0.000000
7/25/2011	3:14:13 PM	H2 MFC set to  0.000000
7/25/2011	3:14:13 PM	BCl3 MFC set to  0.000000
7/25/2011	3:14:13 PM	PHl3 MFC set to  0.000000
7/25/2011	3:14:13 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:14:13 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:14:14 PM	Tube furnace set to 0
7/25/2011	3:14:44 PM	H2 valve closed
7/25/2011	3:14:44 PM	BCl3 valve closed
7/25/2011	3:14:44 PM	PH3 valve closed
7/25/2011	3:14:44 PM	SiCl4 pre valve closed
7/25/2011	3:14:44 PM	SiCl4 post valve closed
7/25/2011	3:14:44 PM	Bypass valve closed
7/25/2011	3:14:44 PM	Bubbler valve closed
7/25/2011	3:14:44 PM	Helium valve opened
7/25/2011	3:14:44 PM	Main Vac valve opened
7/25/2011	3:14:44 PM	Helium MFC set to  20.000000
7/25/2011	3:14:44 PM	H2 MFC set to  0.000000
7/25/2011	3:14:44 PM	BCl3 MFC set to  0.000000
7/25/2011	3:14:44 PM	PHl3 MFC set to  0.000000
7/25/2011	3:14:44 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:14:44 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:14:44 PM	Tube furnace set to 0
7/25/2011	3:15:14 PM	Helium valve closed
7/25/2011	3:15:14 PM	H2 valve closed
7/25/2011	3:15:14 PM	BCl3 valve closed
7/25/2011	3:15:14 PM	PH3 valve closed
7/25/2011	3:15:14 PM	SiCl4 pre valve closed
7/25/2011	3:15:14 PM	SiCl4 post valve closed
7/25/2011	3:15:14 PM	Bypass valve closed
7/25/2011	3:15:14 PM	Bubbler valve closed
7/25/2011	3:15:14 PM	Main Vac valve opened
7/25/2011	3:15:14 PM	Helium MFC set to  0.000000
7/25/2011	3:15:14 PM	H2 MFC set to  0.000000
7/25/2011	3:15:14 PM	BCl3 MFC set to  0.000000
7/25/2011	3:15:14 PM	PHl3 MFC set to  0.000000
7/25/2011	3:15:14 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:15:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:15:14 PM	Tube furnace set to 0
7/25/2011	3:15:44 PM	H2 valve closed
7/25/2011	3:15:44 PM	BCl3 valve closed
7/25/2011	3:15:44 PM	PH3 valve closed
7/25/2011	3:15:44 PM	SiCl4 pre valve closed
7/25/2011	3:15:44 PM	SiCl4 post valve closed
7/25/2011	3:15:44 PM	Bypass valve closed
7/25/2011	3:15:44 PM	Bubbler valve closed
7/25/2011	3:15:44 PM	Helium valve opened
7/25/2011	3:15:44 PM	Main Vac valve opened
7/25/2011	3:15:44 PM	Helium MFC set to  20.000000
7/25/2011	3:15:44 PM	H2 MFC set to  0.000000
7/25/2011	3:15:44 PM	BCl3 MFC set to  0.000000
7/25/2011	3:15:44 PM	PHl3 MFC set to  0.000000
7/25/2011	3:15:44 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:15:44 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:15:44 PM	Tube furnace set to 0
7/25/2011	3:16:14 PM	Helium valve closed
7/25/2011	3:16:14 PM	H2 valve closed
7/25/2011	3:16:14 PM	BCl3 valve closed
7/25/2011	3:16:14 PM	PH3 valve closed
7/25/2011	3:16:14 PM	SiCl4 pre valve closed
7/25/2011	3:16:14 PM	SiCl4 post valve closed
7/25/2011	3:16:14 PM	Bypass valve closed
7/25/2011	3:16:14 PM	Bubbler valve closed
7/25/2011	3:16:14 PM	Main Vac valve opened
7/25/2011	3:16:14 PM	Helium MFC set to  0.000000
7/25/2011	3:16:14 PM	H2 MFC set to  0.000000
7/25/2011	3:16:14 PM	BCl3 MFC set to  0.000000
7/25/2011	3:16:14 PM	PHl3 MFC set to  0.000000
7/25/2011	3:16:14 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:16:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:16:14 PM	Tube furnace set to 0
7/25/2011	3:16:15 PM	Run finished at 3:16 PM
7/25/2011	3:21:03 PM	Main Vac valve closed
7/25/2011	3:21:13 PM	Main Vac valve opened
7/25/2011	3:21:49 PM	Recipe started at 3:21 PM
7/25/2011	3:21:49 PM	Helium valve closed
7/25/2011	3:21:49 PM	H2 valve closed
7/25/2011	3:21:49 PM	BCl3 valve closed
7/25/2011	3:21:49 PM	PH3 valve closed
7/25/2011	3:21:49 PM	SiCl4 pre valve closed
7/25/2011	3:21:49 PM	SiCl4 post valve closed
7/25/2011	3:21:49 PM	Main Vac valve closed
7/25/2011	3:21:49 PM	Bypass valve closed
7/25/2011	3:21:49 PM	Bubbler valve closed
7/25/2011	3:21:49 PM	Helium MFC set to  0.000000
7/25/2011	3:21:49 PM	H2 MFC set to  0.000000
7/25/2011	3:21:49 PM	BCl3 MFC set to  0.000000
7/25/2011	3:21:49 PM	PHl3 MFC set to  0.000000
7/25/2011	3:21:49 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:21:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:21:49 PM	Tube furnace set to 0
7/25/2011	3:21:52 PM	Helium valve closed
7/25/2011	3:21:52 PM	BCl3 valve closed
7/25/2011	3:21:52 PM	PH3 valve closed
7/25/2011	3:21:52 PM	SiCl4 pre valve closed
7/25/2011	3:21:52 PM	SiCl4 post valve closed
7/25/2011	3:21:52 PM	Main Vac valve closed
7/25/2011	3:21:52 PM	Bypass valve closed
7/25/2011	3:21:52 PM	Bubbler valve closed
7/25/2011	3:21:52 PM	H2 valve opened
7/25/2011	3:21:52 PM	Helium MFC set to  0.000000
7/25/2011	3:21:52 PM	H2 MFC set to  500.000000
7/25/2011	3:21:52 PM	BCl3 MFC set to  0.000000
7/25/2011	3:21:52 PM	PHl3 MFC set to  0.000000
7/25/2011	3:21:52 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:21:52 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:21:53 PM	Tube furnace set to 0
7/25/2011	3:22:56 PM	Helium valve closed
7/25/2011	3:22:56 PM	BCl3 valve closed
7/25/2011	3:22:56 PM	PH3 valve closed
7/25/2011	3:22:56 PM	SiCl4 pre valve closed
7/25/2011	3:22:56 PM	SiCl4 post valve closed
7/25/2011	3:22:56 PM	Main Vac valve closed
7/25/2011	3:22:56 PM	Bypass valve closed
7/25/2011	3:22:56 PM	H2 valve opened
7/25/2011	3:22:56 PM	Bubbler valve opened
7/25/2011	3:22:56 PM	Helium MFC set to  0.000000
7/25/2011	3:22:56 PM	H2 MFC set to  500.000000
7/25/2011	3:22:56 PM	BCl3 MFC set to  0.000000
7/25/2011	3:22:56 PM	PHl3 MFC set to  0.000000
7/25/2011	3:22:56 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:22:56 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:22:57 PM	Tube furnace set to 0
7/25/2011	3:22:58 PM	Helium valve closed
7/25/2011	3:22:58 PM	BCl3 valve closed
7/25/2011	3:22:58 PM	PH3 valve closed
7/25/2011	3:22:58 PM	SiCl4 pre valve closed
7/25/2011	3:22:58 PM	SiCl4 post valve closed
7/25/2011	3:22:58 PM	Main Vac valve closed
7/25/2011	3:22:58 PM	Bypass valve closed
7/25/2011	3:22:58 PM	H2 valve opened
7/25/2011	3:22:58 PM	Bubbler valve opened
7/25/2011	3:22:58 PM	Helium MFC set to  0.000000
7/25/2011	3:22:58 PM	H2 MFC set to  500.000000
7/25/2011	3:22:58 PM	BCl3 MFC set to  0.000000
7/25/2011	3:22:58 PM	PHl3 MFC set to  0.000000
7/25/2011	3:22:58 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:22:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:22:58 PM	Tube furnace set to 1000
7/25/2011	3:42:58 PM	Helium valve closed
7/25/2011	3:42:58 PM	PH3 valve closed
7/25/2011	3:42:58 PM	Main Vac valve closed
7/25/2011	3:42:58 PM	Bypass valve closed
7/25/2011	3:42:58 PM	H2 valve opened
7/25/2011	3:42:58 PM	BCl3 valve opened
7/25/2011	3:42:58 PM	SiCl4 pre valve opened
7/25/2011	3:42:58 PM	SiCl4 post valve opened
7/25/2011	3:42:58 PM	Bubbler valve opened
7/25/2011	3:42:58 PM	Helium MFC set to  0.000000
7/25/2011	3:42:58 PM	H2 MFC set to  500.000000
7/25/2011	3:42:58 PM	BCl3 MFC set to  3.000000
7/25/2011	3:42:58 PM	PHl3 MFC set to  0.000000
7/25/2011	3:42:58 PM	SiCl4 MFC set to  50.000000
7/25/2011	3:42:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:42:58 PM	Tube furnace set to 1000
7/25/2011	3:58:58 PM	Helium valve closed
7/25/2011	3:58:58 PM	BCl3 valve closed
7/25/2011	3:58:58 PM	PH3 valve closed
7/25/2011	3:58:58 PM	SiCl4 pre valve closed
7/25/2011	3:58:58 PM	SiCl4 post valve closed
7/25/2011	3:58:58 PM	Main Vac valve closed
7/25/2011	3:58:58 PM	Bypass valve closed
7/25/2011	3:58:58 PM	H2 valve opened
7/25/2011	3:58:58 PM	Bubbler valve opened
7/25/2011	3:58:58 PM	Helium MFC set to  0.000000
7/25/2011	3:58:58 PM	H2 MFC set to  500.000000
7/25/2011	3:58:58 PM	BCl3 MFC set to  0.000000
7/25/2011	3:58:58 PM	PHl3 MFC set to  0.000000
7/25/2011	3:58:58 PM	SiCl4 MFC set to  0.000000
7/25/2011	3:58:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	3:58:58 PM	Tube furnace set to 750
7/25/2011	4:03:58 PM	H2 valve closed
7/25/2011	4:03:58 PM	BCl3 valve closed
7/25/2011	4:03:58 PM	PH3 valve closed
7/25/2011	4:03:58 PM	SiCl4 pre valve closed
7/25/2011	4:03:58 PM	SiCl4 post valve closed
7/25/2011	4:03:58 PM	Main Vac valve closed
7/25/2011	4:03:58 PM	Bypass valve closed
7/25/2011	4:03:58 PM	Helium valve opened
7/25/2011	4:03:58 PM	Bubbler valve opened
7/25/2011	4:03:58 PM	Helium MFC set to  500.000000
7/25/2011	4:03:58 PM	H2 MFC set to  0.000000
7/25/2011	4:03:58 PM	BCl3 MFC set to  0.000000
7/25/2011	4:03:58 PM	PHl3 MFC set to  0.000000
7/25/2011	4:03:58 PM	SiCl4 MFC set to  0.000000
7/25/2011	4:03:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	4:03:58 PM	Tube furnace set to 0
7/25/2011	4:23:58 PM	Helium valve closed
7/25/2011	4:23:58 PM	H2 valve closed
7/25/2011	4:23:58 PM	BCl3 valve closed
7/25/2011	4:23:58 PM	PH3 valve closed
7/25/2011	4:23:58 PM	SiCl4 pre valve closed
7/25/2011	4:23:58 PM	SiCl4 post valve closed
7/25/2011	4:23:58 PM	Main Vac valve closed
7/25/2011	4:23:58 PM	Bypass valve closed
7/25/2011	4:23:58 PM	Bubbler valve closed
7/25/2011	4:23:58 PM	Helium MFC set to  0.000000
7/25/2011	4:23:58 PM	H2 MFC set to  0.000000
7/25/2011	4:23:58 PM	BCl3 MFC set to  0.000000
7/25/2011	4:23:58 PM	PHl3 MFC set to  0.000000
7/25/2011	4:23:58 PM	SiCl4 MFC set to  0.000000
7/25/2011	4:23:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	4:23:58 PM	Tube furnace set to 0
7/25/2011	4:23:59 PM	Run finished at 4:23 PM
7/25/2011	5:12:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	5:12:27 PM	Recipe started at 5:12 PM
7/25/2011	5:12:27 PM	Helium valve closed
7/25/2011	5:12:27 PM	H2 valve closed
7/25/2011	5:12:27 PM	BCl3 valve closed
7/25/2011	5:12:27 PM	PH3 valve closed
7/25/2011	5:12:27 PM	SiCl4 pre valve closed
7/25/2011	5:12:27 PM	SiCl4 post valve closed
7/25/2011	5:12:27 PM	Main Vac valve closed
7/25/2011	5:12:27 PM	Bypass valve closed
7/25/2011	5:12:27 PM	Bubbler valve closed
7/25/2011	5:12:27 PM	Helium MFC set to  0.000000
7/25/2011	5:12:27 PM	H2 MFC set to  0.000000
7/25/2011	5:12:27 PM	BCl3 MFC set to  0.000000
7/25/2011	5:12:27 PM	PHl3 MFC set to  0.000000
7/25/2011	5:12:27 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:12:27 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:12:27 PM	Tube furnace set to 0
7/25/2011	5:12:30 PM	H2 valve closed
7/25/2011	5:12:30 PM	BCl3 valve closed
7/25/2011	5:12:30 PM	PH3 valve closed
7/25/2011	5:12:30 PM	SiCl4 pre valve closed
7/25/2011	5:12:30 PM	SiCl4 post valve closed
7/25/2011	5:12:30 PM	Main Vac valve closed
7/25/2011	5:12:30 PM	Bypass valve closed
7/25/2011	5:12:30 PM	Bubbler valve closed
7/25/2011	5:12:30 PM	Helium valve opened
7/25/2011	5:12:30 PM	Helium MFC set to  500.000000
7/25/2011	5:12:30 PM	H2 MFC set to  0.000000
7/25/2011	5:12:30 PM	BCl3 MFC set to  0.000000
7/25/2011	5:12:30 PM	PHl3 MFC set to  0.000000
7/25/2011	5:12:30 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:12:30 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:12:30 PM	Tube furnace set to 0
7/25/2011	5:12:35 PM	Helium valve closed
7/25/2011	5:12:35 PM	H2 valve closed
7/25/2011	5:12:35 PM	BCl3 valve closed
7/25/2011	5:12:35 PM	PH3 valve closed
7/25/2011	5:12:35 PM	SiCl4 pre valve closed
7/25/2011	5:12:35 PM	SiCl4 post valve closed
7/25/2011	5:12:35 PM	Main Vac valve closed
7/25/2011	5:12:35 PM	Bypass valve closed
7/25/2011	5:12:35 PM	Bubbler valve closed
7/25/2011	5:12:35 PM	Helium MFC set to  0.000000
7/25/2011	5:12:35 PM	H2 MFC set to  0.000000
7/25/2011	5:12:35 PM	BCl3 MFC set to  0.000000
7/25/2011	5:12:35 PM	PHl3 MFC set to  0.000000
7/25/2011	5:12:35 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:12:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:12:35 PM	Tube furnace set to 0
7/25/2011	5:12:36 PM	Run finished at 5:12 PM
7/25/2011	5:12:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	5:17:49 PM	Recipe started at 5:17 PM
7/25/2011	5:17:49 PM	Helium valve closed
7/25/2011	5:17:49 PM	H2 valve closed
7/25/2011	5:17:49 PM	BCl3 valve closed
7/25/2011	5:17:49 PM	PH3 valve closed
7/25/2011	5:17:49 PM	SiCl4 pre valve closed
7/25/2011	5:17:49 PM	SiCl4 post valve closed
7/25/2011	5:17:49 PM	Main Vac valve closed
7/25/2011	5:17:49 PM	Bubbler valve closed
7/25/2011	5:17:49 PM	Bypass valve opened
7/25/2011	5:17:49 PM	Helium MFC set to  0.000000
7/25/2011	5:17:49 PM	H2 MFC set to  0.000000
7/25/2011	5:17:49 PM	BCl3 MFC set to  0.000000
7/25/2011	5:17:49 PM	PHl3 MFC set to  0.000000
7/25/2011	5:17:49 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:17:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:17:49 PM	Tube furnace set to 0
7/25/2011	5:18:49 PM	Helium valve closed
7/25/2011	5:18:49 PM	H2 valve closed
7/25/2011	5:18:49 PM	BCl3 valve closed
7/25/2011	5:18:49 PM	PH3 valve closed
7/25/2011	5:18:49 PM	SiCl4 pre valve closed
7/25/2011	5:18:49 PM	SiCl4 post valve closed
7/25/2011	5:18:49 PM	Main Vac valve closed
7/25/2011	5:18:49 PM	Bubbler valve closed
7/25/2011	5:18:49 PM	Bypass valve opened
7/25/2011	5:18:49 PM	Helium MFC set to  0.000000
7/25/2011	5:18:49 PM	H2 MFC set to  0.000000
7/25/2011	5:18:49 PM	BCl3 MFC set to  0.000000
7/25/2011	5:18:49 PM	PHl3 MFC set to  0.000000
7/25/2011	5:18:49 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:18:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:18:49 PM	Tube furnace set to 0
7/25/2011	5:19:19 PM	Helium valve closed
7/25/2011	5:19:19 PM	H2 valve closed
7/25/2011	5:19:19 PM	BCl3 valve closed
7/25/2011	5:19:19 PM	PH3 valve closed
7/25/2011	5:19:19 PM	SiCl4 pre valve closed
7/25/2011	5:19:19 PM	SiCl4 post valve closed
7/25/2011	5:19:19 PM	Bypass valve closed
7/25/2011	5:19:19 PM	Bubbler valve closed
7/25/2011	5:19:19 PM	Main Vac valve opened
7/25/2011	5:19:19 PM	Helium MFC set to  0.000000
7/25/2011	5:19:19 PM	H2 MFC set to  0.000000
7/25/2011	5:19:19 PM	BCl3 MFC set to  0.000000
7/25/2011	5:19:19 PM	PHl3 MFC set to  0.000000
7/25/2011	5:19:19 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:19:19 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:19:20 PM	Tube furnace set to 0
7/25/2011	5:49:20 PM	H2 valve closed
7/25/2011	5:49:20 PM	BCl3 valve closed
7/25/2011	5:49:20 PM	PH3 valve closed
7/25/2011	5:49:20 PM	SiCl4 pre valve closed
7/25/2011	5:49:20 PM	SiCl4 post valve closed
7/25/2011	5:49:20 PM	Bypass valve closed
7/25/2011	5:49:20 PM	Bubbler valve closed
7/25/2011	5:49:20 PM	Helium valve opened
7/25/2011	5:49:20 PM	Main Vac valve opened
7/25/2011	5:49:20 PM	Helium MFC set to  20.000000
7/25/2011	5:49:20 PM	H2 MFC set to  0.000000
7/25/2011	5:49:20 PM	BCl3 MFC set to  0.000000
7/25/2011	5:49:20 PM	PHl3 MFC set to  0.000000
7/25/2011	5:49:20 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:49:20 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:49:20 PM	Tube furnace set to 0
7/25/2011	5:49:50 PM	Helium valve closed
7/25/2011	5:49:50 PM	H2 valve closed
7/25/2011	5:49:50 PM	BCl3 valve closed
7/25/2011	5:49:50 PM	PH3 valve closed
7/25/2011	5:49:50 PM	SiCl4 pre valve closed
7/25/2011	5:49:50 PM	SiCl4 post valve closed
7/25/2011	5:49:50 PM	Bypass valve closed
7/25/2011	5:49:50 PM	Bubbler valve closed
7/25/2011	5:49:50 PM	Main Vac valve opened
7/25/2011	5:49:50 PM	Helium MFC set to  0.000000
7/25/2011	5:49:50 PM	H2 MFC set to  0.000000
7/25/2011	5:49:50 PM	BCl3 MFC set to  0.000000
7/25/2011	5:49:50 PM	PHl3 MFC set to  0.000000
7/25/2011	5:49:50 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:49:50 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:49:50 PM	Tube furnace set to 0
7/25/2011	5:50:20 PM	H2 valve closed
7/25/2011	5:50:20 PM	BCl3 valve closed
7/25/2011	5:50:20 PM	PH3 valve closed
7/25/2011	5:50:20 PM	SiCl4 pre valve closed
7/25/2011	5:50:20 PM	SiCl4 post valve closed
7/25/2011	5:50:20 PM	Bypass valve closed
7/25/2011	5:50:20 PM	Bubbler valve closed
7/25/2011	5:50:20 PM	Helium valve opened
7/25/2011	5:50:20 PM	Main Vac valve opened
7/25/2011	5:50:20 PM	Helium MFC set to  20.000000
7/25/2011	5:50:20 PM	H2 MFC set to  0.000000
7/25/2011	5:50:20 PM	BCl3 MFC set to  0.000000
7/25/2011	5:50:20 PM	PHl3 MFC set to  0.000000
7/25/2011	5:50:20 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:50:20 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:50:20 PM	Tube furnace set to 0
7/25/2011	5:50:50 PM	Helium valve closed
7/25/2011	5:50:50 PM	H2 valve closed
7/25/2011	5:50:50 PM	BCl3 valve closed
7/25/2011	5:50:50 PM	PH3 valve closed
7/25/2011	5:50:50 PM	SiCl4 pre valve closed
7/25/2011	5:50:50 PM	SiCl4 post valve closed
7/25/2011	5:50:50 PM	Bypass valve closed
7/25/2011	5:50:50 PM	Bubbler valve closed
7/25/2011	5:50:50 PM	Main Vac valve opened
7/25/2011	5:50:50 PM	Helium MFC set to  0.000000
7/25/2011	5:50:50 PM	H2 MFC set to  0.000000
7/25/2011	5:50:50 PM	BCl3 MFC set to  0.000000
7/25/2011	5:50:50 PM	PHl3 MFC set to  0.000000
7/25/2011	5:50:50 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:50:50 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:50:50 PM	Tube furnace set to 0
7/25/2011	5:51:20 PM	H2 valve closed
7/25/2011	5:51:20 PM	BCl3 valve closed
7/25/2011	5:51:20 PM	PH3 valve closed
7/25/2011	5:51:20 PM	SiCl4 pre valve closed
7/25/2011	5:51:20 PM	SiCl4 post valve closed
7/25/2011	5:51:20 PM	Bypass valve closed
7/25/2011	5:51:20 PM	Bubbler valve closed
7/25/2011	5:51:20 PM	Helium valve opened
7/25/2011	5:51:20 PM	Main Vac valve opened
7/25/2011	5:51:20 PM	Helium MFC set to  20.000000
7/25/2011	5:51:20 PM	H2 MFC set to  0.000000
7/25/2011	5:51:20 PM	BCl3 MFC set to  0.000000
7/25/2011	5:51:20 PM	PHl3 MFC set to  0.000000
7/25/2011	5:51:20 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:51:20 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:51:21 PM	Tube furnace set to 0
7/25/2011	5:51:51 PM	Helium valve closed
7/25/2011	5:51:51 PM	H2 valve closed
7/25/2011	5:51:51 PM	BCl3 valve closed
7/25/2011	5:51:51 PM	PH3 valve closed
7/25/2011	5:51:51 PM	SiCl4 pre valve closed
7/25/2011	5:51:51 PM	SiCl4 post valve closed
7/25/2011	5:51:51 PM	Bypass valve closed
7/25/2011	5:51:51 PM	Bubbler valve closed
7/25/2011	5:51:51 PM	Main Vac valve opened
7/25/2011	5:51:51 PM	Helium MFC set to  0.000000
7/25/2011	5:51:51 PM	H2 MFC set to  0.000000
7/25/2011	5:51:51 PM	BCl3 MFC set to  0.000000
7/25/2011	5:51:51 PM	PHl3 MFC set to  0.000000
7/25/2011	5:51:51 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:51:51 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:51:51 PM	Tube furnace set to 0
7/25/2011	5:52:21 PM	H2 valve closed
7/25/2011	5:52:21 PM	BCl3 valve closed
7/25/2011	5:52:21 PM	PH3 valve closed
7/25/2011	5:52:21 PM	SiCl4 pre valve closed
7/25/2011	5:52:21 PM	SiCl4 post valve closed
7/25/2011	5:52:21 PM	Bypass valve closed
7/25/2011	5:52:21 PM	Bubbler valve closed
7/25/2011	5:52:21 PM	Helium valve opened
7/25/2011	5:52:21 PM	Main Vac valve opened
7/25/2011	5:52:21 PM	Helium MFC set to  20.000000
7/25/2011	5:52:21 PM	H2 MFC set to  0.000000
7/25/2011	5:52:21 PM	BCl3 MFC set to  0.000000
7/25/2011	5:52:21 PM	PHl3 MFC set to  0.000000
7/25/2011	5:52:21 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:52:21 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:52:21 PM	Tube furnace set to 0
7/25/2011	5:52:51 PM	Helium valve closed
7/25/2011	5:52:51 PM	H2 valve closed
7/25/2011	5:52:51 PM	BCl3 valve closed
7/25/2011	5:52:51 PM	PH3 valve closed
7/25/2011	5:52:51 PM	SiCl4 pre valve closed
7/25/2011	5:52:51 PM	SiCl4 post valve closed
7/25/2011	5:52:51 PM	Bypass valve closed
7/25/2011	5:52:51 PM	Bubbler valve closed
7/25/2011	5:52:51 PM	Main Vac valve opened
7/25/2011	5:52:51 PM	Helium MFC set to  0.000000
7/25/2011	5:52:51 PM	H2 MFC set to  0.000000
7/25/2011	5:52:51 PM	BCl3 MFC set to  0.000000
7/25/2011	5:52:51 PM	PHl3 MFC set to  0.000000
7/25/2011	5:52:51 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:52:51 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:52:51 PM	Tube furnace set to 0
7/25/2011	5:53:21 PM	H2 valve closed
7/25/2011	5:53:21 PM	BCl3 valve closed
7/25/2011	5:53:21 PM	PH3 valve closed
7/25/2011	5:53:21 PM	SiCl4 pre valve closed
7/25/2011	5:53:21 PM	SiCl4 post valve closed
7/25/2011	5:53:21 PM	Bypass valve closed
7/25/2011	5:53:21 PM	Bubbler valve closed
7/25/2011	5:53:21 PM	Helium valve opened
7/25/2011	5:53:21 PM	Main Vac valve opened
7/25/2011	5:53:21 PM	Helium MFC set to  20.000000
7/25/2011	5:53:21 PM	H2 MFC set to  0.000000
7/25/2011	5:53:21 PM	BCl3 MFC set to  0.000000
7/25/2011	5:53:21 PM	PHl3 MFC set to  0.000000
7/25/2011	5:53:21 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:53:21 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:53:21 PM	Tube furnace set to 0
7/25/2011	5:53:51 PM	Helium valve closed
7/25/2011	5:53:51 PM	H2 valve closed
7/25/2011	5:53:51 PM	BCl3 valve closed
7/25/2011	5:53:51 PM	PH3 valve closed
7/25/2011	5:53:51 PM	SiCl4 pre valve closed
7/25/2011	5:53:51 PM	SiCl4 post valve closed
7/25/2011	5:53:51 PM	Bypass valve closed
7/25/2011	5:53:51 PM	Bubbler valve closed
7/25/2011	5:53:51 PM	Main Vac valve opened
7/25/2011	5:53:51 PM	Helium MFC set to  0.000000
7/25/2011	5:53:51 PM	H2 MFC set to  0.000000
7/25/2011	5:53:51 PM	BCl3 MFC set to  0.000000
7/25/2011	5:53:51 PM	PHl3 MFC set to  0.000000
7/25/2011	5:53:51 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:53:51 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:53:52 PM	Tube furnace set to 0
7/25/2011	5:54:22 PM	H2 valve closed
7/25/2011	5:54:22 PM	BCl3 valve closed
7/25/2011	5:54:22 PM	PH3 valve closed
7/25/2011	5:54:22 PM	SiCl4 pre valve closed
7/25/2011	5:54:22 PM	SiCl4 post valve closed
7/25/2011	5:54:22 PM	Bypass valve closed
7/25/2011	5:54:22 PM	Bubbler valve closed
7/25/2011	5:54:22 PM	Helium valve opened
7/25/2011	5:54:22 PM	Main Vac valve opened
7/25/2011	5:54:22 PM	Helium MFC set to  20.000000
7/25/2011	5:54:22 PM	H2 MFC set to  0.000000
7/25/2011	5:54:22 PM	BCl3 MFC set to  0.000000
7/25/2011	5:54:22 PM	PHl3 MFC set to  0.000000
7/25/2011	5:54:22 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:54:22 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:54:22 PM	Tube furnace set to 0
7/25/2011	5:54:52 PM	Helium valve closed
7/25/2011	5:54:52 PM	H2 valve closed
7/25/2011	5:54:52 PM	BCl3 valve closed
7/25/2011	5:54:52 PM	PH3 valve closed
7/25/2011	5:54:52 PM	SiCl4 pre valve closed
7/25/2011	5:54:52 PM	SiCl4 post valve closed
7/25/2011	5:54:52 PM	Bypass valve closed
7/25/2011	5:54:52 PM	Bubbler valve closed
7/25/2011	5:54:52 PM	Main Vac valve opened
7/25/2011	5:54:52 PM	Helium MFC set to  0.000000
7/25/2011	5:54:52 PM	H2 MFC set to  0.000000
7/25/2011	5:54:52 PM	BCl3 MFC set to  0.000000
7/25/2011	5:54:52 PM	PHl3 MFC set to  0.000000
7/25/2011	5:54:52 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:54:52 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:54:52 PM	Tube furnace set to 0
7/25/2011	5:55:22 PM	H2 valve closed
7/25/2011	5:55:22 PM	BCl3 valve closed
7/25/2011	5:55:22 PM	PH3 valve closed
7/25/2011	5:55:22 PM	SiCl4 pre valve closed
7/25/2011	5:55:22 PM	SiCl4 post valve closed
7/25/2011	5:55:22 PM	Bypass valve closed
7/25/2011	5:55:22 PM	Bubbler valve closed
7/25/2011	5:55:22 PM	Helium valve opened
7/25/2011	5:55:22 PM	Main Vac valve opened
7/25/2011	5:55:22 PM	Helium MFC set to  20.000000
7/25/2011	5:55:22 PM	H2 MFC set to  0.000000
7/25/2011	5:55:22 PM	BCl3 MFC set to  0.000000
7/25/2011	5:55:22 PM	PHl3 MFC set to  0.000000
7/25/2011	5:55:22 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:55:22 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:55:22 PM	Tube furnace set to 0
7/25/2011	5:55:52 PM	Helium valve closed
7/25/2011	5:55:52 PM	H2 valve closed
7/25/2011	5:55:52 PM	BCl3 valve closed
7/25/2011	5:55:52 PM	PH3 valve closed
7/25/2011	5:55:52 PM	SiCl4 pre valve closed
7/25/2011	5:55:52 PM	SiCl4 post valve closed
7/25/2011	5:55:52 PM	Bypass valve closed
7/25/2011	5:55:52 PM	Bubbler valve closed
7/25/2011	5:55:52 PM	Main Vac valve opened
7/25/2011	5:55:52 PM	Helium MFC set to  0.000000
7/25/2011	5:55:52 PM	H2 MFC set to  0.000000
7/25/2011	5:55:52 PM	BCl3 MFC set to  0.000000
7/25/2011	5:55:52 PM	PHl3 MFC set to  0.000000
7/25/2011	5:55:52 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:55:52 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:55:52 PM	Tube furnace set to 0
7/25/2011	5:56:22 PM	H2 valve closed
7/25/2011	5:56:22 PM	BCl3 valve closed
7/25/2011	5:56:22 PM	PH3 valve closed
7/25/2011	5:56:22 PM	SiCl4 pre valve closed
7/25/2011	5:56:22 PM	SiCl4 post valve closed
7/25/2011	5:56:22 PM	Bypass valve closed
7/25/2011	5:56:22 PM	Bubbler valve closed
7/25/2011	5:56:22 PM	Helium valve opened
7/25/2011	5:56:23 PM	Main Vac valve opened
7/25/2011	5:56:23 PM	Helium MFC set to  20.000000
7/25/2011	5:56:23 PM	H2 MFC set to  0.000000
7/25/2011	5:56:23 PM	BCl3 MFC set to  0.000000
7/25/2011	5:56:23 PM	PHl3 MFC set to  0.000000
7/25/2011	5:56:23 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:56:23 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:56:23 PM	Tube furnace set to 0
7/25/2011	5:56:53 PM	Helium valve closed
7/25/2011	5:56:53 PM	H2 valve closed
7/25/2011	5:56:53 PM	BCl3 valve closed
7/25/2011	5:56:53 PM	PH3 valve closed
7/25/2011	5:56:53 PM	SiCl4 pre valve closed
7/25/2011	5:56:53 PM	SiCl4 post valve closed
7/25/2011	5:56:53 PM	Bypass valve closed
7/25/2011	5:56:53 PM	Bubbler valve closed
7/25/2011	5:56:53 PM	Main Vac valve opened
7/25/2011	5:56:53 PM	Helium MFC set to  0.000000
7/25/2011	5:56:53 PM	H2 MFC set to  0.000000
7/25/2011	5:56:53 PM	BCl3 MFC set to  0.000000
7/25/2011	5:56:53 PM	PHl3 MFC set to  0.000000
7/25/2011	5:56:53 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:56:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:56:53 PM	Tube furnace set to 0
7/25/2011	5:57:23 PM	H2 valve closed
7/25/2011	5:57:23 PM	BCl3 valve closed
7/25/2011	5:57:23 PM	PH3 valve closed
7/25/2011	5:57:23 PM	SiCl4 pre valve closed
7/25/2011	5:57:23 PM	SiCl4 post valve closed
7/25/2011	5:57:23 PM	Bypass valve closed
7/25/2011	5:57:23 PM	Bubbler valve closed
7/25/2011	5:57:23 PM	Helium valve opened
7/25/2011	5:57:23 PM	Main Vac valve opened
7/25/2011	5:57:23 PM	Helium MFC set to  20.000000
7/25/2011	5:57:23 PM	H2 MFC set to  0.000000
7/25/2011	5:57:23 PM	BCl3 MFC set to  0.000000
7/25/2011	5:57:23 PM	PHl3 MFC set to  0.000000
7/25/2011	5:57:23 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:57:23 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:57:23 PM	Tube furnace set to 0
7/25/2011	5:57:53 PM	Helium valve closed
7/25/2011	5:57:53 PM	H2 valve closed
7/25/2011	5:57:53 PM	BCl3 valve closed
7/25/2011	5:57:53 PM	PH3 valve closed
7/25/2011	5:57:53 PM	SiCl4 pre valve closed
7/25/2011	5:57:53 PM	SiCl4 post valve closed
7/25/2011	5:57:53 PM	Bypass valve closed
7/25/2011	5:57:53 PM	Bubbler valve closed
7/25/2011	5:57:53 PM	Main Vac valve opened
7/25/2011	5:57:53 PM	Helium MFC set to  0.000000
7/25/2011	5:57:53 PM	H2 MFC set to  0.000000
7/25/2011	5:57:53 PM	BCl3 MFC set to  0.000000
7/25/2011	5:57:53 PM	PHl3 MFC set to  0.000000
7/25/2011	5:57:53 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:57:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:57:53 PM	Tube furnace set to 0
7/25/2011	5:58:23 PM	H2 valve closed
7/25/2011	5:58:23 PM	BCl3 valve closed
7/25/2011	5:58:23 PM	PH3 valve closed
7/25/2011	5:58:23 PM	SiCl4 pre valve closed
7/25/2011	5:58:23 PM	SiCl4 post valve closed
7/25/2011	5:58:23 PM	Bypass valve closed
7/25/2011	5:58:23 PM	Bubbler valve closed
7/25/2011	5:58:23 PM	Helium valve opened
7/25/2011	5:58:23 PM	Main Vac valve opened
7/25/2011	5:58:23 PM	Helium MFC set to  20.000000
7/25/2011	5:58:23 PM	H2 MFC set to  0.000000
7/25/2011	5:58:23 PM	BCl3 MFC set to  0.000000
7/25/2011	5:58:23 PM	PHl3 MFC set to  0.000000
7/25/2011	5:58:23 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:58:23 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:58:23 PM	Tube furnace set to 0
7/25/2011	5:58:53 PM	Helium valve closed
7/25/2011	5:58:53 PM	H2 valve closed
7/25/2011	5:58:53 PM	BCl3 valve closed
7/25/2011	5:58:53 PM	PH3 valve closed
7/25/2011	5:58:54 PM	SiCl4 pre valve closed
7/25/2011	5:58:54 PM	SiCl4 post valve closed
7/25/2011	5:58:54 PM	Bypass valve closed
7/25/2011	5:58:54 PM	Bubbler valve closed
7/25/2011	5:58:54 PM	Main Vac valve opened
7/25/2011	5:58:54 PM	Helium MFC set to  0.000000
7/25/2011	5:58:54 PM	H2 MFC set to  0.000000
7/25/2011	5:58:54 PM	BCl3 MFC set to  0.000000
7/25/2011	5:58:54 PM	PHl3 MFC set to  0.000000
7/25/2011	5:58:54 PM	SiCl4 MFC set to  0.000000
7/25/2011	5:58:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	5:58:54 PM	Tube furnace set to 0
7/25/2011	5:58:55 PM	Run finished at 5:58 PM
7/25/2011	5:59:37 PM	Main Vac valve closed
7/25/2011	5:59:50 PM	Main Vac valve opened
7/25/2011	6:00:26 PM	Main Vac valve closed
7/25/2011	6:00:40 PM	Main Vac valve opened
7/25/2011	6:00:40 PM	Main Vac valve closed
7/25/2011	6:00:41 PM	Main Vac valve opened
7/25/2011	6:00:41 PM	Main Vac valve closed
7/25/2011	6:00:42 PM	Main Vac valve opened
7/25/2011	6:01:45 PM	Recipe started at 6:01 PM
7/25/2011	6:01:45 PM	Helium valve closed
7/25/2011	6:01:45 PM	H2 valve closed
7/25/2011	6:01:45 PM	BCl3 valve closed
7/25/2011	6:01:45 PM	PH3 valve closed
7/25/2011	6:01:45 PM	SiCl4 pre valve closed
7/25/2011	6:01:45 PM	SiCl4 post valve closed
7/25/2011	6:01:45 PM	Main Vac valve closed
7/25/2011	6:01:45 PM	Bypass valve closed
7/25/2011	6:01:45 PM	Bubbler valve closed
7/25/2011	6:01:45 PM	Helium MFC set to  0.000000
7/25/2011	6:01:45 PM	H2 MFC set to  0.000000
7/25/2011	6:01:45 PM	BCl3 MFC set to  0.000000
7/25/2011	6:01:45 PM	PHl3 MFC set to  0.000000
7/25/2011	6:01:45 PM	SiCl4 MFC set to  0.000000
7/25/2011	6:01:45 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	6:01:46 PM	Tube furnace set to 0
7/25/2011	6:01:49 PM	Helium valve closed
7/25/2011	6:01:49 PM	BCl3 valve closed
7/25/2011	6:01:49 PM	PH3 valve closed
7/25/2011	6:01:49 PM	SiCl4 pre valve closed
7/25/2011	6:01:49 PM	SiCl4 post valve closed
7/25/2011	6:01:49 PM	Main Vac valve closed
7/25/2011	6:01:49 PM	Bypass valve closed
7/25/2011	6:01:49 PM	Bubbler valve closed
7/25/2011	6:01:49 PM	H2 valve opened
7/25/2011	6:01:49 PM	Helium MFC set to  0.000000
7/25/2011	6:01:49 PM	H2 MFC set to  500.000000
7/25/2011	6:01:49 PM	BCl3 MFC set to  0.000000
7/25/2011	6:01:49 PM	PHl3 MFC set to  0.000000
7/25/2011	6:01:49 PM	SiCl4 MFC set to  0.000000
7/25/2011	6:01:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	6:01:49 PM	Tube furnace set to 0
7/25/2011	6:02:53 PM	Helium valve closed
7/25/2011	6:02:53 PM	BCl3 valve closed
7/25/2011	6:02:53 PM	PH3 valve closed
7/25/2011	6:02:53 PM	SiCl4 pre valve closed
7/25/2011	6:02:53 PM	SiCl4 post valve closed
7/25/2011	6:02:53 PM	Main Vac valve closed
7/25/2011	6:02:53 PM	Bypass valve closed
7/25/2011	6:02:53 PM	H2 valve opened
7/25/2011	6:02:53 PM	Bubbler valve opened
7/25/2011	6:02:53 PM	Helium MFC set to  0.000000
7/25/2011	6:02:53 PM	H2 MFC set to  500.000000
7/25/2011	6:02:53 PM	BCl3 MFC set to  0.000000
7/25/2011	6:02:53 PM	PHl3 MFC set to  0.000000
7/25/2011	6:02:53 PM	SiCl4 MFC set to  0.000000
7/25/2011	6:02:53 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	6:02:53 PM	Tube furnace set to 0
7/25/2011	6:02:54 PM	Helium valve closed
7/25/2011	6:02:54 PM	BCl3 valve closed
7/25/2011	6:02:54 PM	PH3 valve closed
7/25/2011	6:02:54 PM	SiCl4 pre valve closed
7/25/2011	6:02:54 PM	SiCl4 post valve closed
7/25/2011	6:02:54 PM	Main Vac valve closed
7/25/2011	6:02:54 PM	Bypass valve closed
7/25/2011	6:02:54 PM	H2 valve opened
7/25/2011	6:02:54 PM	Bubbler valve opened
7/25/2011	6:02:54 PM	Helium MFC set to  0.000000
7/25/2011	6:02:54 PM	H2 MFC set to  500.000000
7/25/2011	6:02:54 PM	BCl3 MFC set to  0.000000
7/25/2011	6:02:54 PM	PHl3 MFC set to  0.000000
7/25/2011	6:02:54 PM	SiCl4 MFC set to  0.000000
7/25/2011	6:02:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	6:02:54 PM	Tube furnace set to 1000
7/25/2011	6:22:54 PM	Helium valve closed
7/25/2011	6:22:54 PM	PH3 valve closed
7/25/2011	6:22:54 PM	Main Vac valve closed
7/25/2011	6:22:54 PM	Bypass valve closed
7/25/2011	6:22:54 PM	H2 valve opened
7/25/2011	6:22:54 PM	BCl3 valve opened
7/25/2011	6:22:54 PM	SiCl4 pre valve opened
7/25/2011	6:22:54 PM	SiCl4 post valve opened
7/25/2011	6:22:54 PM	Bubbler valve opened
7/25/2011	6:22:54 PM	Helium MFC set to  0.000000
7/25/2011	6:22:54 PM	H2 MFC set to  500.000000
7/25/2011	6:22:54 PM	BCl3 MFC set to  2.000000
7/25/2011	6:22:54 PM	PHl3 MFC set to  0.000000
7/25/2011	6:22:54 PM	SiCl4 MFC set to  50.000000
7/25/2011	6:22:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	6:22:54 PM	Tube furnace set to 1000
7/25/2011	6:38:54 PM	Helium valve closed
7/25/2011	6:38:54 PM	BCl3 valve closed
7/25/2011	6:38:54 PM	PH3 valve closed
7/25/2011	6:38:54 PM	SiCl4 pre valve closed
7/25/2011	6:38:54 PM	SiCl4 post valve closed
7/25/2011	6:38:54 PM	Main Vac valve closed
7/25/2011	6:38:54 PM	Bypass valve closed
7/25/2011	6:38:54 PM	H2 valve opened
7/25/2011	6:38:54 PM	Bubbler valve opened
7/25/2011	6:38:54 PM	Helium MFC set to  0.000000
7/25/2011	6:38:54 PM	H2 MFC set to  500.000000
7/25/2011	6:38:54 PM	BCl3 MFC set to  0.000000
7/25/2011	6:38:54 PM	PHl3 MFC set to  0.000000
7/25/2011	6:38:54 PM	SiCl4 MFC set to  0.000000
7/25/2011	6:38:54 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	6:38:55 PM	Tube furnace set to 750
7/25/2011	6:43:55 PM	H2 valve closed
7/25/2011	6:43:55 PM	BCl3 valve closed
7/25/2011	6:43:55 PM	PH3 valve closed
7/25/2011	6:43:55 PM	SiCl4 pre valve closed
7/25/2011	6:43:55 PM	SiCl4 post valve closed
7/25/2011	6:43:55 PM	Main Vac valve closed
7/25/2011	6:43:55 PM	Bypass valve closed
7/25/2011	6:43:55 PM	Helium valve opened
7/25/2011	6:43:55 PM	Bubbler valve opened
7/25/2011	6:43:55 PM	Helium MFC set to  500.000000
7/25/2011	6:43:55 PM	H2 MFC set to  0.000000
7/25/2011	6:43:55 PM	BCl3 MFC set to  0.000000
7/25/2011	6:43:55 PM	PHl3 MFC set to  0.000000
7/25/2011	6:43:55 PM	SiCl4 MFC set to  0.000000
7/25/2011	6:43:55 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	6:43:55 PM	Tube furnace set to 0
7/25/2011	7:03:55 PM	Helium valve closed
7/25/2011	7:03:55 PM	H2 valve closed
7/25/2011	7:03:55 PM	BCl3 valve closed
7/25/2011	7:03:55 PM	PH3 valve closed
7/25/2011	7:03:55 PM	SiCl4 pre valve closed
7/25/2011	7:03:55 PM	SiCl4 post valve closed
7/25/2011	7:03:55 PM	Main Vac valve closed
7/25/2011	7:03:55 PM	Bypass valve closed
7/25/2011	7:03:55 PM	Bubbler valve closed
7/25/2011	7:03:55 PM	Helium MFC set to  0.000000
7/25/2011	7:03:55 PM	H2 MFC set to  0.000000
7/25/2011	7:03:55 PM	BCl3 MFC set to  0.000000
7/25/2011	7:03:55 PM	PHl3 MFC set to  0.000000
7/25/2011	7:03:55 PM	SiCl4 MFC set to  0.000000
7/25/2011	7:03:55 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	7:03:55 PM	Tube furnace set to 0
7/25/2011	7:03:56 PM	Run finished at 7:03 PM
7/25/2011	8:43:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:43:26 PM	Recipe started at 8:43 PM
7/25/2011	8:43:26 PM	Helium valve closed
7/25/2011	8:43:26 PM	H2 valve closed
7/25/2011	8:43:26 PM	BCl3 valve closed
7/25/2011	8:43:26 PM	PH3 valve closed
7/25/2011	8:43:26 PM	SiCl4 pre valve closed
7/25/2011	8:43:26 PM	SiCl4 post valve closed
7/25/2011	8:43:26 PM	Main Vac valve closed
7/25/2011	8:43:26 PM	Bypass valve closed
7/25/2011	8:43:26 PM	Bubbler valve closed
7/25/2011	8:43:26 PM	Helium MFC set to  0.000000
7/25/2011	8:43:26 PM	H2 MFC set to  0.000000
7/25/2011	8:43:26 PM	BCl3 MFC set to  0.000000
7/25/2011	8:43:26 PM	PHl3 MFC set to  0.000000
7/25/2011	8:43:26 PM	SiCl4 MFC set to  0.000000
7/25/2011	8:43:26 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:43:26 PM	Tube furnace set to 0
7/25/2011	8:43:29 PM	H2 valve closed
7/25/2011	8:43:29 PM	BCl3 valve closed
7/25/2011	8:43:29 PM	PH3 valve closed
7/25/2011	8:43:29 PM	SiCl4 pre valve closed
7/25/2011	8:43:29 PM	SiCl4 post valve closed
7/25/2011	8:43:29 PM	Main Vac valve closed
7/25/2011	8:43:29 PM	Bypass valve closed
7/25/2011	8:43:29 PM	Bubbler valve closed
7/25/2011	8:43:29 PM	Helium valve opened
7/25/2011	8:43:29 PM	Helium MFC set to  500.000000
7/25/2011	8:43:29 PM	H2 MFC set to  0.000000
7/25/2011	8:43:29 PM	BCl3 MFC set to  0.000000
7/25/2011	8:43:29 PM	PHl3 MFC set to  0.000000
7/25/2011	8:43:29 PM	SiCl4 MFC set to  0.000000
7/25/2011	8:43:29 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:43:29 PM	Tube furnace set to 0
7/25/2011	8:43:34 PM	Helium valve closed
7/25/2011	8:43:34 PM	H2 valve closed
7/25/2011	8:43:34 PM	BCl3 valve closed
7/25/2011	8:43:34 PM	PH3 valve closed
7/25/2011	8:43:34 PM	SiCl4 pre valve closed
7/25/2011	8:43:34 PM	SiCl4 post valve closed
7/25/2011	8:43:34 PM	Main Vac valve closed
7/25/2011	8:43:34 PM	Bypass valve closed
7/25/2011	8:43:34 PM	Bubbler valve closed
7/25/2011	8:43:34 PM	Helium MFC set to  0.000000
7/25/2011	8:43:34 PM	H2 MFC set to  0.000000
7/25/2011	8:43:34 PM	BCl3 MFC set to  0.000000
7/25/2011	8:43:34 PM	PHl3 MFC set to  0.000000
7/25/2011	8:43:34 PM	SiCl4 MFC set to  0.000000
7/25/2011	8:43:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:43:34 PM	Tube furnace set to 0
7/25/2011	8:43:35 PM	Run finished at 8:43 PM
7/25/2011	8:43:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	8:48:31 PM	Recipe started at 8:48 PM
7/25/2011	8:48:31 PM	Helium valve closed
7/25/2011	8:48:31 PM	H2 valve closed
7/25/2011	8:48:31 PM	BCl3 valve closed
7/25/2011	8:48:31 PM	PH3 valve closed
7/25/2011	8:48:31 PM	SiCl4 pre valve closed
7/25/2011	8:48:31 PM	SiCl4 post valve closed
7/25/2011	8:48:31 PM	Main Vac valve closed
7/25/2011	8:48:31 PM	Bubbler valve closed
7/25/2011	8:48:31 PM	Bypass valve opened
7/25/2011	8:48:31 PM	Helium MFC set to  0.000000
7/25/2011	8:48:31 PM	H2 MFC set to  0.000000
7/25/2011	8:48:31 PM	BCl3 MFC set to  0.000000
7/25/2011	8:48:31 PM	PHl3 MFC set to  0.000000
7/25/2011	8:48:31 PM	SiCl4 MFC set to  0.000000
7/25/2011	8:48:31 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:48:31 PM	Tube furnace set to 0
7/25/2011	8:49:32 PM	Helium valve closed
7/25/2011	8:49:32 PM	H2 valve closed
7/25/2011	8:49:32 PM	BCl3 valve closed
7/25/2011	8:49:32 PM	PH3 valve closed
7/25/2011	8:49:32 PM	SiCl4 pre valve closed
7/25/2011	8:49:32 PM	SiCl4 post valve closed
7/25/2011	8:49:32 PM	Main Vac valve closed
7/25/2011	8:49:32 PM	Bubbler valve closed
7/25/2011	8:49:32 PM	Bypass valve opened
7/25/2011	8:49:32 PM	Helium MFC set to  0.000000
7/25/2011	8:49:32 PM	H2 MFC set to  0.000000
7/25/2011	8:49:32 PM	BCl3 MFC set to  0.000000
7/25/2011	8:49:32 PM	PHl3 MFC set to  0.000000
7/25/2011	8:49:32 PM	SiCl4 MFC set to  0.000000
7/25/2011	8:49:32 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:49:32 PM	Tube furnace set to 0
7/25/2011	8:50:02 PM	Helium valve closed
7/25/2011	8:50:02 PM	H2 valve closed
7/25/2011	8:50:02 PM	BCl3 valve closed
7/25/2011	8:50:02 PM	PH3 valve closed
7/25/2011	8:50:02 PM	SiCl4 pre valve closed
7/25/2011	8:50:02 PM	SiCl4 post valve closed
7/25/2011	8:50:02 PM	Bypass valve closed
7/25/2011	8:50:02 PM	Bubbler valve closed
7/25/2011	8:50:02 PM	Main Vac valve opened
7/25/2011	8:50:02 PM	Helium MFC set to  0.000000
7/25/2011	8:50:02 PM	H2 MFC set to  0.000000
7/25/2011	8:50:02 PM	BCl3 MFC set to  0.000000
7/25/2011	8:50:02 PM	PHl3 MFC set to  0.000000
7/25/2011	8:50:02 PM	SiCl4 MFC set to  0.000000
7/25/2011	8:50:02 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	8:50:02 PM	Tube furnace set to 0
7/25/2011	9:20:02 PM	H2 valve closed
7/25/2011	9:20:02 PM	BCl3 valve closed
7/25/2011	9:20:02 PM	PH3 valve closed
7/25/2011	9:20:02 PM	SiCl4 pre valve closed
7/25/2011	9:20:02 PM	SiCl4 post valve closed
7/25/2011	9:20:02 PM	Bypass valve closed
7/25/2011	9:20:02 PM	Bubbler valve closed
7/25/2011	9:20:02 PM	Helium valve opened
7/25/2011	9:20:02 PM	Main Vac valve opened
7/25/2011	9:20:02 PM	Helium MFC set to  20.000000
7/25/2011	9:20:02 PM	H2 MFC set to  0.000000
7/25/2011	9:20:02 PM	BCl3 MFC set to  0.000000
7/25/2011	9:20:02 PM	PHl3 MFC set to  0.000000
7/25/2011	9:20:02 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:20:02 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:20:02 PM	Tube furnace set to 0
7/25/2011	9:20:32 PM	Helium valve closed
7/25/2011	9:20:32 PM	H2 valve closed
7/25/2011	9:20:32 PM	BCl3 valve closed
7/25/2011	9:20:33 PM	PH3 valve closed
7/25/2011	9:20:33 PM	SiCl4 pre valve closed
7/25/2011	9:20:33 PM	SiCl4 post valve closed
7/25/2011	9:20:33 PM	Bypass valve closed
7/25/2011	9:20:33 PM	Bubbler valve closed
7/25/2011	9:20:33 PM	Main Vac valve opened
7/25/2011	9:20:33 PM	Helium MFC set to  0.000000
7/25/2011	9:20:33 PM	H2 MFC set to  0.000000
7/25/2011	9:20:33 PM	BCl3 MFC set to  0.000000
7/25/2011	9:20:33 PM	PHl3 MFC set to  0.000000
7/25/2011	9:20:33 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:20:33 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:20:33 PM	Tube furnace set to 0
7/25/2011	9:21:03 PM	H2 valve closed
7/25/2011	9:21:03 PM	BCl3 valve closed
7/25/2011	9:21:03 PM	PH3 valve closed
7/25/2011	9:21:03 PM	SiCl4 pre valve closed
7/25/2011	9:21:03 PM	SiCl4 post valve closed
7/25/2011	9:21:03 PM	Bypass valve closed
7/25/2011	9:21:03 PM	Bubbler valve closed
7/25/2011	9:21:03 PM	Helium valve opened
7/25/2011	9:21:03 PM	Main Vac valve opened
7/25/2011	9:21:03 PM	Helium MFC set to  20.000000
7/25/2011	9:21:03 PM	H2 MFC set to  0.000000
7/25/2011	9:21:03 PM	BCl3 MFC set to  0.000000
7/25/2011	9:21:03 PM	PHl3 MFC set to  0.000000
7/25/2011	9:21:03 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:21:03 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:21:03 PM	Tube furnace set to 0
7/25/2011	9:21:33 PM	Helium valve closed
7/25/2011	9:21:33 PM	H2 valve closed
7/25/2011	9:21:33 PM	BCl3 valve closed
7/25/2011	9:21:33 PM	PH3 valve closed
7/25/2011	9:21:33 PM	SiCl4 pre valve closed
7/25/2011	9:21:33 PM	SiCl4 post valve closed
7/25/2011	9:21:33 PM	Bypass valve closed
7/25/2011	9:21:33 PM	Bubbler valve closed
7/25/2011	9:21:33 PM	Main Vac valve opened
7/25/2011	9:21:33 PM	Helium MFC set to  0.000000
7/25/2011	9:21:33 PM	H2 MFC set to  0.000000
7/25/2011	9:21:33 PM	BCl3 MFC set to  0.000000
7/25/2011	9:21:33 PM	PHl3 MFC set to  0.000000
7/25/2011	9:21:33 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:21:33 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:21:33 PM	Tube furnace set to 0
7/25/2011	9:22:03 PM	H2 valve closed
7/25/2011	9:22:03 PM	BCl3 valve closed
7/25/2011	9:22:03 PM	PH3 valve closed
7/25/2011	9:22:03 PM	SiCl4 pre valve closed
7/25/2011	9:22:03 PM	SiCl4 post valve closed
7/25/2011	9:22:03 PM	Bypass valve closed
7/25/2011	9:22:03 PM	Bubbler valve closed
7/25/2011	9:22:03 PM	Helium valve opened
7/25/2011	9:22:03 PM	Main Vac valve opened
7/25/2011	9:22:03 PM	Helium MFC set to  20.000000
7/25/2011	9:22:03 PM	H2 MFC set to  0.000000
7/25/2011	9:22:03 PM	BCl3 MFC set to  0.000000
7/25/2011	9:22:03 PM	PHl3 MFC set to  0.000000
7/25/2011	9:22:03 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:22:03 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:22:03 PM	Tube furnace set to 0
7/25/2011	9:22:33 PM	Helium valve closed
7/25/2011	9:22:33 PM	H2 valve closed
7/25/2011	9:22:33 PM	BCl3 valve closed
7/25/2011	9:22:33 PM	PH3 valve closed
7/25/2011	9:22:33 PM	SiCl4 pre valve closed
7/25/2011	9:22:33 PM	SiCl4 post valve closed
7/25/2011	9:22:33 PM	Bypass valve closed
7/25/2011	9:22:33 PM	Bubbler valve closed
7/25/2011	9:22:33 PM	Main Vac valve opened
7/25/2011	9:22:33 PM	Helium MFC set to  0.000000
7/25/2011	9:22:33 PM	H2 MFC set to  0.000000
7/25/2011	9:22:33 PM	BCl3 MFC set to  0.000000
7/25/2011	9:22:33 PM	PHl3 MFC set to  0.000000
7/25/2011	9:22:33 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:22:33 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:22:33 PM	Tube furnace set to 0
7/25/2011	9:23:03 PM	H2 valve closed
7/25/2011	9:23:03 PM	BCl3 valve closed
7/25/2011	9:23:03 PM	PH3 valve closed
7/25/2011	9:23:03 PM	SiCl4 pre valve closed
7/25/2011	9:23:03 PM	SiCl4 post valve closed
7/25/2011	9:23:03 PM	Bypass valve closed
7/25/2011	9:23:04 PM	Bubbler valve closed
7/25/2011	9:23:04 PM	Helium valve opened
7/25/2011	9:23:04 PM	Main Vac valve opened
7/25/2011	9:23:04 PM	Helium MFC set to  20.000000
7/25/2011	9:23:04 PM	H2 MFC set to  0.000000
7/25/2011	9:23:04 PM	BCl3 MFC set to  0.000000
7/25/2011	9:23:04 PM	PHl3 MFC set to  0.000000
7/25/2011	9:23:04 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:23:04 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:23:04 PM	Tube furnace set to 0
7/25/2011	9:23:34 PM	Helium valve closed
7/25/2011	9:23:34 PM	H2 valve closed
7/25/2011	9:23:34 PM	BCl3 valve closed
7/25/2011	9:23:34 PM	PH3 valve closed
7/25/2011	9:23:34 PM	SiCl4 pre valve closed
7/25/2011	9:23:34 PM	SiCl4 post valve closed
7/25/2011	9:23:34 PM	Bypass valve closed
7/25/2011	9:23:34 PM	Bubbler valve closed
7/25/2011	9:23:34 PM	Main Vac valve opened
7/25/2011	9:23:34 PM	Helium MFC set to  0.000000
7/25/2011	9:23:34 PM	H2 MFC set to  0.000000
7/25/2011	9:23:34 PM	BCl3 MFC set to  0.000000
7/25/2011	9:23:34 PM	PHl3 MFC set to  0.000000
7/25/2011	9:23:34 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:23:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:23:34 PM	Tube furnace set to 0
7/25/2011	9:24:04 PM	H2 valve closed
7/25/2011	9:24:04 PM	BCl3 valve closed
7/25/2011	9:24:04 PM	PH3 valve closed
7/25/2011	9:24:04 PM	SiCl4 pre valve closed
7/25/2011	9:24:04 PM	SiCl4 post valve closed
7/25/2011	9:24:04 PM	Bypass valve closed
7/25/2011	9:24:04 PM	Bubbler valve closed
7/25/2011	9:24:04 PM	Helium valve opened
7/25/2011	9:24:04 PM	Main Vac valve opened
7/25/2011	9:24:04 PM	Helium MFC set to  20.000000
7/25/2011	9:24:04 PM	H2 MFC set to  0.000000
7/25/2011	9:24:04 PM	BCl3 MFC set to  0.000000
7/25/2011	9:24:04 PM	PHl3 MFC set to  0.000000
7/25/2011	9:24:04 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:24:04 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:24:04 PM	Tube furnace set to 0
7/25/2011	9:24:34 PM	Helium valve closed
7/25/2011	9:24:34 PM	H2 valve closed
7/25/2011	9:24:34 PM	BCl3 valve closed
7/25/2011	9:24:34 PM	PH3 valve closed
7/25/2011	9:24:34 PM	SiCl4 pre valve closed
7/25/2011	9:24:34 PM	SiCl4 post valve closed
7/25/2011	9:24:34 PM	Bypass valve closed
7/25/2011	9:24:34 PM	Bubbler valve closed
7/25/2011	9:24:34 PM	Main Vac valve opened
7/25/2011	9:24:34 PM	Helium MFC set to  0.000000
7/25/2011	9:24:34 PM	H2 MFC set to  0.000000
7/25/2011	9:24:34 PM	BCl3 MFC set to  0.000000
7/25/2011	9:24:34 PM	PHl3 MFC set to  0.000000
7/25/2011	9:24:34 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:24:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:24:34 PM	Tube furnace set to 0
7/25/2011	9:25:04 PM	H2 valve closed
7/25/2011	9:25:04 PM	BCl3 valve closed
7/25/2011	9:25:04 PM	PH3 valve closed
7/25/2011	9:25:04 PM	SiCl4 pre valve closed
7/25/2011	9:25:04 PM	SiCl4 post valve closed
7/25/2011	9:25:04 PM	Bypass valve closed
7/25/2011	9:25:04 PM	Bubbler valve closed
7/25/2011	9:25:04 PM	Helium valve opened
7/25/2011	9:25:04 PM	Main Vac valve opened
7/25/2011	9:25:04 PM	Helium MFC set to  20.000000
7/25/2011	9:25:04 PM	H2 MFC set to  0.000000
7/25/2011	9:25:04 PM	BCl3 MFC set to  0.000000
7/25/2011	9:25:04 PM	PHl3 MFC set to  0.000000
7/25/2011	9:25:04 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:25:04 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:25:04 PM	Tube furnace set to 0
7/25/2011	9:25:34 PM	Helium valve closed
7/25/2011	9:25:34 PM	H2 valve closed
7/25/2011	9:25:35 PM	BCl3 valve closed
7/25/2011	9:25:35 PM	PH3 valve closed
7/25/2011	9:25:35 PM	SiCl4 pre valve closed
7/25/2011	9:25:35 PM	SiCl4 post valve closed
7/25/2011	9:25:35 PM	Bypass valve closed
7/25/2011	9:25:35 PM	Bubbler valve closed
7/25/2011	9:25:35 PM	Main Vac valve opened
7/25/2011	9:25:35 PM	Helium MFC set to  0.000000
7/25/2011	9:25:35 PM	H2 MFC set to  0.000000
7/25/2011	9:25:35 PM	BCl3 MFC set to  0.000000
7/25/2011	9:25:35 PM	PHl3 MFC set to  0.000000
7/25/2011	9:25:35 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:25:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:25:35 PM	Tube furnace set to 0
7/25/2011	9:26:05 PM	H2 valve closed
7/25/2011	9:26:05 PM	BCl3 valve closed
7/25/2011	9:26:05 PM	PH3 valve closed
7/25/2011	9:26:05 PM	SiCl4 pre valve closed
7/25/2011	9:26:05 PM	SiCl4 post valve closed
7/25/2011	9:26:05 PM	Bypass valve closed
7/25/2011	9:26:05 PM	Bubbler valve closed
7/25/2011	9:26:05 PM	Helium valve opened
7/25/2011	9:26:05 PM	Main Vac valve opened
7/25/2011	9:26:05 PM	Helium MFC set to  20.000000
7/25/2011	9:26:05 PM	H2 MFC set to  0.000000
7/25/2011	9:26:05 PM	BCl3 MFC set to  0.000000
7/25/2011	9:26:05 PM	PHl3 MFC set to  0.000000
7/25/2011	9:26:05 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:26:05 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:26:05 PM	Tube furnace set to 0
7/25/2011	9:26:35 PM	Helium valve closed
7/25/2011	9:26:35 PM	H2 valve closed
7/25/2011	9:26:35 PM	BCl3 valve closed
7/25/2011	9:26:35 PM	PH3 valve closed
7/25/2011	9:26:35 PM	SiCl4 pre valve closed
7/25/2011	9:26:35 PM	SiCl4 post valve closed
7/25/2011	9:26:35 PM	Bypass valve closed
7/25/2011	9:26:35 PM	Bubbler valve closed
7/25/2011	9:26:35 PM	Main Vac valve opened
7/25/2011	9:26:35 PM	Helium MFC set to  0.000000
7/25/2011	9:26:35 PM	H2 MFC set to  0.000000
7/25/2011	9:26:35 PM	BCl3 MFC set to  0.000000
7/25/2011	9:26:35 PM	PHl3 MFC set to  0.000000
7/25/2011	9:26:35 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:26:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:26:35 PM	Tube furnace set to 0
7/25/2011	9:27:05 PM	H2 valve closed
7/25/2011	9:27:05 PM	BCl3 valve closed
7/25/2011	9:27:05 PM	PH3 valve closed
7/25/2011	9:27:05 PM	SiCl4 pre valve closed
7/25/2011	9:27:05 PM	SiCl4 post valve closed
7/25/2011	9:27:05 PM	Bypass valve closed
7/25/2011	9:27:05 PM	Bubbler valve closed
7/25/2011	9:27:05 PM	Helium valve opened
7/25/2011	9:27:05 PM	Main Vac valve opened
7/25/2011	9:27:05 PM	Helium MFC set to  20.000000
7/25/2011	9:27:05 PM	H2 MFC set to  0.000000
7/25/2011	9:27:05 PM	BCl3 MFC set to  0.000000
7/25/2011	9:27:05 PM	PHl3 MFC set to  0.000000
7/25/2011	9:27:05 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:27:05 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:27:05 PM	Tube furnace set to 0
7/25/2011	9:27:35 PM	Helium valve closed
7/25/2011	9:27:35 PM	H2 valve closed
7/25/2011	9:27:35 PM	BCl3 valve closed
7/25/2011	9:27:35 PM	PH3 valve closed
7/25/2011	9:27:35 PM	SiCl4 pre valve closed
7/25/2011	9:27:35 PM	SiCl4 post valve closed
7/25/2011	9:27:35 PM	Bypass valve closed
7/25/2011	9:27:35 PM	Bubbler valve closed
7/25/2011	9:27:35 PM	Main Vac valve opened
7/25/2011	9:27:35 PM	Helium MFC set to  0.000000
7/25/2011	9:27:35 PM	H2 MFC set to  0.000000
7/25/2011	9:27:35 PM	BCl3 MFC set to  0.000000
7/25/2011	9:27:35 PM	PHl3 MFC set to  0.000000
7/25/2011	9:27:35 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:27:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:27:35 PM	Tube furnace set to 0
7/25/2011	9:28:05 PM	H2 valve closed
7/25/2011	9:28:06 PM	BCl3 valve closed
7/25/2011	9:28:06 PM	PH3 valve closed
7/25/2011	9:28:06 PM	SiCl4 pre valve closed
7/25/2011	9:28:06 PM	SiCl4 post valve closed
7/25/2011	9:28:06 PM	Bypass valve closed
7/25/2011	9:28:06 PM	Bubbler valve closed
7/25/2011	9:28:06 PM	Helium valve opened
7/25/2011	9:28:06 PM	Main Vac valve opened
7/25/2011	9:28:06 PM	Helium MFC set to  20.000000
7/25/2011	9:28:06 PM	H2 MFC set to  0.000000
7/25/2011	9:28:06 PM	BCl3 MFC set to  0.000000
7/25/2011	9:28:06 PM	PHl3 MFC set to  0.000000
7/25/2011	9:28:06 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:28:06 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:28:06 PM	Tube furnace set to 0
7/25/2011	9:28:36 PM	Helium valve closed
7/25/2011	9:28:36 PM	H2 valve closed
7/25/2011	9:28:36 PM	BCl3 valve closed
7/25/2011	9:28:36 PM	PH3 valve closed
7/25/2011	9:28:36 PM	SiCl4 pre valve closed
7/25/2011	9:28:36 PM	SiCl4 post valve closed
7/25/2011	9:28:36 PM	Bypass valve closed
7/25/2011	9:28:36 PM	Bubbler valve closed
7/25/2011	9:28:36 PM	Main Vac valve opened
7/25/2011	9:28:36 PM	Helium MFC set to  0.000000
7/25/2011	9:28:36 PM	H2 MFC set to  0.000000
7/25/2011	9:28:36 PM	BCl3 MFC set to  0.000000
7/25/2011	9:28:36 PM	PHl3 MFC set to  0.000000
7/25/2011	9:28:36 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:28:36 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:28:36 PM	Tube furnace set to 0
7/25/2011	9:29:06 PM	H2 valve closed
7/25/2011	9:29:06 PM	BCl3 valve closed
7/25/2011	9:29:06 PM	PH3 valve closed
7/25/2011	9:29:06 PM	SiCl4 pre valve closed
7/25/2011	9:29:06 PM	SiCl4 post valve closed
7/25/2011	9:29:06 PM	Bypass valve closed
7/25/2011	9:29:06 PM	Bubbler valve closed
7/25/2011	9:29:06 PM	Helium valve opened
7/25/2011	9:29:06 PM	Main Vac valve opened
7/25/2011	9:29:06 PM	Helium MFC set to  20.000000
7/25/2011	9:29:06 PM	H2 MFC set to  0.000000
7/25/2011	9:29:06 PM	BCl3 MFC set to  0.000000
7/25/2011	9:29:06 PM	PHl3 MFC set to  0.000000
7/25/2011	9:29:06 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:29:06 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:29:06 PM	Tube furnace set to 0
7/25/2011	9:29:36 PM	Helium valve closed
7/25/2011	9:29:36 PM	H2 valve closed
7/25/2011	9:29:36 PM	BCl3 valve closed
7/25/2011	9:29:36 PM	PH3 valve closed
7/25/2011	9:29:36 PM	SiCl4 pre valve closed
7/25/2011	9:29:36 PM	SiCl4 post valve closed
7/25/2011	9:29:36 PM	Bypass valve closed
7/25/2011	9:29:36 PM	Bubbler valve closed
7/25/2011	9:29:36 PM	Main Vac valve opened
7/25/2011	9:29:36 PM	Helium MFC set to  0.000000
7/25/2011	9:29:36 PM	H2 MFC set to  0.000000
7/25/2011	9:29:36 PM	BCl3 MFC set to  0.000000
7/25/2011	9:29:36 PM	PHl3 MFC set to  0.000000
7/25/2011	9:29:36 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:29:36 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:29:36 PM	Tube furnace set to 0
7/25/2011	9:29:37 PM	Run finished at 9:29 PM
7/25/2011	9:53:32 PM	Main Vac valve closed
7/25/2011	9:53:43 PM	Main Vac valve opened
7/25/2011	9:54:08 PM	Recipe started at 9:54 PM
7/25/2011	9:54:08 PM	Helium valve closed
7/25/2011	9:54:08 PM	H2 valve closed
7/25/2011	9:54:08 PM	BCl3 valve closed
7/25/2011	9:54:08 PM	PH3 valve closed
7/25/2011	9:54:08 PM	SiCl4 pre valve closed
7/25/2011	9:54:08 PM	SiCl4 post valve closed
7/25/2011	9:54:08 PM	Main Vac valve closed
7/25/2011	9:54:08 PM	Bypass valve closed
7/25/2011	9:54:08 PM	Bubbler valve closed
7/25/2011	9:54:08 PM	Helium MFC set to  0.000000
7/25/2011	9:54:08 PM	H2 MFC set to  0.000000
7/25/2011	9:54:08 PM	BCl3 MFC set to  0.000000
7/25/2011	9:54:08 PM	PHl3 MFC set to  0.000000
7/25/2011	9:54:08 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:54:08 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:54:08 PM	Tube furnace set to 0
7/25/2011	9:54:11 PM	Helium valve closed
7/25/2011	9:54:11 PM	BCl3 valve closed
7/25/2011	9:54:11 PM	PH3 valve closed
7/25/2011	9:54:11 PM	SiCl4 pre valve closed
7/25/2011	9:54:11 PM	SiCl4 post valve closed
7/25/2011	9:54:11 PM	Main Vac valve closed
7/25/2011	9:54:11 PM	Bypass valve closed
7/25/2011	9:54:11 PM	Bubbler valve closed
7/25/2011	9:54:11 PM	H2 valve opened
7/25/2011	9:54:11 PM	Helium MFC set to  0.000000
7/25/2011	9:54:11 PM	H2 MFC set to  500.000000
7/25/2011	9:54:11 PM	BCl3 MFC set to  0.000000
7/25/2011	9:54:11 PM	PHl3 MFC set to  0.000000
7/25/2011	9:54:11 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:54:11 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:54:11 PM	Tube furnace set to 0
7/25/2011	9:55:17 PM	Helium valve closed
7/25/2011	9:55:17 PM	BCl3 valve closed
7/25/2011	9:55:17 PM	PH3 valve closed
7/25/2011	9:55:17 PM	SiCl4 pre valve closed
7/25/2011	9:55:17 PM	SiCl4 post valve closed
7/25/2011	9:55:17 PM	Main Vac valve closed
7/25/2011	9:55:17 PM	Bypass valve closed
7/25/2011	9:55:17 PM	H2 valve opened
7/25/2011	9:55:17 PM	Bubbler valve opened
7/25/2011	9:55:17 PM	Helium MFC set to  0.000000
7/25/2011	9:55:17 PM	H2 MFC set to  500.000000
7/25/2011	9:55:17 PM	BCl3 MFC set to  0.000000
7/25/2011	9:55:17 PM	PHl3 MFC set to  0.000000
7/25/2011	9:55:17 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:55:17 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:55:17 PM	Tube furnace set to 0
7/25/2011	9:55:18 PM	Helium valve closed
7/25/2011	9:55:18 PM	BCl3 valve closed
7/25/2011	9:55:18 PM	PH3 valve closed
7/25/2011	9:55:18 PM	SiCl4 pre valve closed
7/25/2011	9:55:18 PM	SiCl4 post valve closed
7/25/2011	9:55:18 PM	Main Vac valve closed
7/25/2011	9:55:18 PM	Bypass valve closed
7/25/2011	9:55:18 PM	H2 valve opened
7/25/2011	9:55:18 PM	Bubbler valve opened
7/25/2011	9:55:18 PM	Helium MFC set to  0.000000
7/25/2011	9:55:18 PM	H2 MFC set to  500.000000
7/25/2011	9:55:18 PM	BCl3 MFC set to  0.000000
7/25/2011	9:55:18 PM	PHl3 MFC set to  0.000000
7/25/2011	9:55:18 PM	SiCl4 MFC set to  0.000000
7/25/2011	9:55:18 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	9:55:18 PM	Tube furnace set to 1000
7/25/2011	10:15:18 PM	Helium valve closed
7/25/2011	10:15:18 PM	PH3 valve closed
7/25/2011	10:15:18 PM	Main Vac valve closed
7/25/2011	10:15:18 PM	Bypass valve closed
7/25/2011	10:15:18 PM	H2 valve opened
7/25/2011	10:15:18 PM	BCl3 valve opened
7/25/2011	10:15:18 PM	SiCl4 pre valve opened
7/25/2011	10:15:18 PM	SiCl4 post valve opened
7/25/2011	10:15:18 PM	Bubbler valve opened
7/25/2011	10:15:18 PM	Helium MFC set to  0.000000
7/25/2011	10:15:18 PM	H2 MFC set to  500.000000
7/25/2011	10:15:18 PM	BCl3 MFC set to  2.000000
7/25/2011	10:15:18 PM	PHl3 MFC set to  0.000000
7/25/2011	10:15:18 PM	SiCl4 MFC set to  50.000000
7/25/2011	10:15:18 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:15:19 PM	Tube furnace set to 1000
7/25/2011	10:31:19 PM	Helium valve closed
7/25/2011	10:31:19 PM	BCl3 valve closed
7/25/2011	10:31:19 PM	PH3 valve closed
7/25/2011	10:31:19 PM	SiCl4 pre valve closed
7/25/2011	10:31:19 PM	SiCl4 post valve closed
7/25/2011	10:31:19 PM	Main Vac valve closed
7/25/2011	10:31:19 PM	Bypass valve closed
7/25/2011	10:31:19 PM	H2 valve opened
7/25/2011	10:31:19 PM	Bubbler valve opened
7/25/2011	10:31:19 PM	Helium MFC set to  0.000000
7/25/2011	10:31:19 PM	H2 MFC set to  500.000000
7/25/2011	10:31:19 PM	BCl3 MFC set to  0.000000
7/25/2011	10:31:19 PM	PHl3 MFC set to  0.000000
7/25/2011	10:31:19 PM	SiCl4 MFC set to  0.000000
7/25/2011	10:31:19 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:31:19 PM	Tube furnace set to 750
7/25/2011	10:36:19 PM	H2 valve closed
7/25/2011	10:36:19 PM	BCl3 valve closed
7/25/2011	10:36:19 PM	PH3 valve closed
7/25/2011	10:36:19 PM	SiCl4 pre valve closed
7/25/2011	10:36:19 PM	SiCl4 post valve closed
7/25/2011	10:36:19 PM	Main Vac valve closed
7/25/2011	10:36:19 PM	Bypass valve closed
7/25/2011	10:36:19 PM	Helium valve opened
7/25/2011	10:36:19 PM	Bubbler valve opened
7/25/2011	10:36:19 PM	Helium MFC set to  500.000000
7/25/2011	10:36:19 PM	H2 MFC set to  0.000000
7/25/2011	10:36:19 PM	BCl3 MFC set to  0.000000
7/25/2011	10:36:19 PM	PHl3 MFC set to  0.000000
7/25/2011	10:36:19 PM	SiCl4 MFC set to  0.000000
7/25/2011	10:36:19 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:36:19 PM	Tube furnace set to 0
7/25/2011	10:56:19 PM	Helium valve closed
7/25/2011	10:56:19 PM	H2 valve closed
7/25/2011	10:56:19 PM	BCl3 valve closed
7/25/2011	10:56:19 PM	PH3 valve closed
7/25/2011	10:56:19 PM	SiCl4 pre valve closed
7/25/2011	10:56:19 PM	SiCl4 post valve closed
7/25/2011	10:56:19 PM	Main Vac valve closed
7/25/2011	10:56:19 PM	Bypass valve closed
7/25/2011	10:56:19 PM	Bubbler valve closed
7/25/2011	10:56:19 PM	Helium MFC set to  0.000000
7/25/2011	10:56:19 PM	H2 MFC set to  0.000000
7/25/2011	10:56:19 PM	BCl3 MFC set to  0.000000
7/25/2011	10:56:19 PM	PHl3 MFC set to  0.000000
7/25/2011	10:56:19 PM	SiCl4 MFC set to  0.000000
7/25/2011	10:56:19 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	10:56:19 PM	Tube furnace set to 0
7/25/2011	10:56:20 PM	Run finished at 10:56 PM
7/25/2011	11:32:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	11:32:48 PM	Recipe started at 11:32 PM
7/25/2011	11:32:48 PM	Helium valve closed
7/25/2011	11:32:48 PM	H2 valve closed
7/25/2011	11:32:48 PM	BCl3 valve closed
7/25/2011	11:32:48 PM	PH3 valve closed
7/25/2011	11:32:48 PM	SiCl4 pre valve closed
7/25/2011	11:32:48 PM	SiCl4 post valve closed
7/25/2011	11:32:48 PM	Main Vac valve closed
7/25/2011	11:32:48 PM	Bypass valve closed
7/25/2011	11:32:48 PM	Bubbler valve closed
7/25/2011	11:32:48 PM	Helium MFC set to  0.000000
7/25/2011	11:32:48 PM	H2 MFC set to  0.000000
7/25/2011	11:32:48 PM	BCl3 MFC set to  0.000000
7/25/2011	11:32:48 PM	PHl3 MFC set to  0.000000
7/25/2011	11:32:48 PM	SiCl4 MFC set to  0.000000
7/25/2011	11:32:48 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:32:48 PM	Tube furnace set to 0
7/25/2011	11:32:51 PM	H2 valve closed
7/25/2011	11:32:51 PM	BCl3 valve closed
7/25/2011	11:32:51 PM	PH3 valve closed
7/25/2011	11:32:51 PM	SiCl4 pre valve closed
7/25/2011	11:32:51 PM	SiCl4 post valve closed
7/25/2011	11:32:51 PM	Main Vac valve closed
7/25/2011	11:32:51 PM	Bypass valve closed
7/25/2011	11:32:51 PM	Bubbler valve closed
7/25/2011	11:32:51 PM	Helium valve opened
7/25/2011	11:32:51 PM	Helium MFC set to  500.000000
7/25/2011	11:32:51 PM	H2 MFC set to  0.000000
7/25/2011	11:32:51 PM	BCl3 MFC set to  0.000000
7/25/2011	11:32:51 PM	PHl3 MFC set to  0.000000
7/25/2011	11:32:51 PM	SiCl4 MFC set to  0.000000
7/25/2011	11:32:51 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:32:51 PM	Tube furnace set to 0
7/25/2011	11:32:56 PM	Helium valve closed
7/25/2011	11:32:56 PM	H2 valve closed
7/25/2011	11:32:56 PM	BCl3 valve closed
7/25/2011	11:32:56 PM	PH3 valve closed
7/25/2011	11:32:56 PM	SiCl4 pre valve closed
7/25/2011	11:32:56 PM	SiCl4 post valve closed
7/25/2011	11:32:56 PM	Main Vac valve closed
7/25/2011	11:32:56 PM	Bypass valve closed
7/25/2011	11:32:56 PM	Bubbler valve closed
7/25/2011	11:32:56 PM	Helium MFC set to  0.000000
7/25/2011	11:32:56 PM	H2 MFC set to  0.000000
7/25/2011	11:32:56 PM	BCl3 MFC set to  0.000000
7/25/2011	11:32:56 PM	PHl3 MFC set to  0.000000
7/25/2011	11:32:56 PM	SiCl4 MFC set to  0.000000
7/25/2011	11:32:56 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:32:56 PM	Tube furnace set to 0
7/25/2011	11:32:57 PM	Run finished at 11:32 PM
7/25/2011	11:32:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2011	11:45:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2011	11:45:52 PM	Recipe started at 11:45 PM
7/25/2011	11:45:52 PM	Helium valve closed
7/25/2011	11:45:52 PM	H2 valve closed
7/25/2011	11:45:52 PM	BCl3 valve closed
7/25/2011	11:45:52 PM	PH3 valve closed
7/25/2011	11:45:52 PM	SiCl4 pre valve closed
7/25/2011	11:45:52 PM	SiCl4 post valve closed
7/25/2011	11:45:52 PM	Main Vac valve closed
7/25/2011	11:45:52 PM	Bubbler valve closed
7/25/2011	11:45:52 PM	Bypass valve opened
7/25/2011	11:45:52 PM	Helium MFC set to  0.000000
7/25/2011	11:45:52 PM	H2 MFC set to  0.000000
7/25/2011	11:45:52 PM	BCl3 MFC set to  0.000000
7/25/2011	11:45:52 PM	PHl3 MFC set to  0.000000
7/25/2011	11:45:52 PM	SiCl4 MFC set to  0.000000
7/25/2011	11:45:52 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:45:52 PM	Tube furnace set to 0
7/25/2011	11:46:59 PM	Helium valve closed
7/25/2011	11:46:59 PM	H2 valve closed
7/25/2011	11:46:59 PM	BCl3 valve closed
7/25/2011	11:46:59 PM	PH3 valve closed
7/25/2011	11:46:59 PM	SiCl4 pre valve closed
7/25/2011	11:46:59 PM	SiCl4 post valve closed
7/25/2011	11:46:59 PM	Main Vac valve closed
7/25/2011	11:46:59 PM	Bubbler valve closed
7/25/2011	11:46:59 PM	Bypass valve opened
7/25/2011	11:46:59 PM	Helium MFC set to  0.000000
7/25/2011	11:46:59 PM	H2 MFC set to  0.000000
7/25/2011	11:46:59 PM	BCl3 MFC set to  0.000000
7/25/2011	11:46:59 PM	PHl3 MFC set to  0.000000
7/25/2011	11:46:59 PM	SiCl4 MFC set to  0.000000
7/25/2011	11:46:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:46:59 PM	Tube furnace set to 0
7/25/2011	11:47:59 PM	Helium valve closed
7/25/2011	11:47:59 PM	H2 valve closed
7/25/2011	11:47:59 PM	BCl3 valve closed
7/25/2011	11:47:59 PM	PH3 valve closed
7/25/2011	11:47:59 PM	SiCl4 pre valve closed
7/25/2011	11:47:59 PM	SiCl4 post valve closed
7/25/2011	11:47:59 PM	Bypass valve closed
7/25/2011	11:47:59 PM	Bubbler valve closed
7/25/2011	11:47:59 PM	Main Vac valve opened
7/25/2011	11:47:59 PM	Helium MFC set to  0.000000
7/25/2011	11:47:59 PM	H2 MFC set to  0.000000
7/25/2011	11:47:59 PM	BCl3 MFC set to  0.000000
7/25/2011	11:47:59 PM	PHl3 MFC set to  0.000000
7/25/2011	11:47:59 PM	SiCl4 MFC set to  0.000000
7/25/2011	11:47:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2011	11:47:59 PM	Tube furnace set to 0
7/25/2011	11:48:00 PM	Run finished at 11:48 PM
7/25/2011	11:48:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
